We have been developing the X-ray silicon-on-insulator (SOI) pixel sensor called XRPIX for future astrophysical satellites. XRPIX is a monolithic active pixel sensor consisting of a high-resistivity Si sensor, thin SiO$_2$ insulator, and CMOS pixel circuits that utilize SOI technology. Since XRPIX is capable of event-driven readouts, it can achieve high timing resolution greater than $\sim 10{\rm ~\mu s}$, which enables low background observation by adopting the anti-coincidence technique. One of the major issues in the development of XRPIX is the electrical interference between the sensor layer and circuit layer, which causes nonuniform detection efficiency at the pixel boundaries. In order to reduce the interference, we introduce a Double-SOI (D-SOI) structure, in which a thin Si layer (middle Si) is added to the insulator layer of the SOI structure. In this structure, the middle Si layer works as an electrical shield to decouple the sensor layer and circuit layer. We measured the detector response of the XRPIX with D-SOI structure at KEK. We irradiated the X-ray beam collimated with $4{\rm ~\mu m\phi}$ pinhole, and scanned the device with $6{\rm ~\mu m}$ pitch, which is 1/6 of the pixel size. In this paper, we present the improvement in the uniformity of the detection efficiency in D-SOI sensors, and discuss the detailed X-ray response and its physical origins.

RX J0046.5$-$7308 is a shell-type supernova remnant (SNR) in the Small Magellanic Cloud (SMC). We carried out new $^{12}$CO($J$ = 1-0, 3-2) observations toward the SNR using Mopra and the Atacama Submillimeter Telescope Experiment. We found eight molecular clouds (A-H) along the X-ray shell of the SNR. The typical cloud size and mass are $\sim$10-15 pc and $\sim$1000-3000 $M_{\odot}$, respectively. The X-ray shell is slightly deformed and has the brightest peak in the southwestern shell where two molecular clouds A and B are located. The four molecular clouds A, B, F, and G have high intensity ratios of $^{12}$CO($J$ = 3-2) / $^{12}$CO($J$ = 1-0) $> 1.2$, which are not attributable to any identified internal infrared sources or high-mass stars. The HI cavity and its expanding motion are found toward the SNR, which are likely created by strong stellar winds from a massive progenitor. We suggest that the molecular clouds A-D, F, and G and HI clouds within the wind-blown cavity at $V_\mathrm{LSR} = 117.1$-122.5 km s$^{-1}$ are to be associated with the SNR. The X-ray spectroscopy reveals the dynamical age of $26000^{+1000}_{-2000}$ yr and the progenitor mass of $\gtrsim 30$ $M_{\odot}$, which is also consistent with the proposed scenario. We determine physical conditions of the giant molecular cloud LIRS 36A using the large velocity gradient analysis with archival datasets of the Atacama Large Millimeter/submillimeter Array; the kinematic temperature is $72^{+50}_{-37}$ K and the number density of molecular hydrogen is $1500^{+600}_{-300}$ cm$^{-3}$. The next generation of $\gamma$-ray observations will allow us to study the pion-decay $\gamma$-rays from the molecular clouds in the SMC SNR.

We report on a measurement of the size of charge clouds produced by X-ray photons in X-ray SOI (Silicon-On-Insulator) pixel sensor named XRPIX. We carry out a beam scanning experiment of XRPIX using a monochromatic X-ray beam at 5.0 keV collimated to $\sim 10$ $\mu$m with a 4-$\mu$m$\phi$ pinhole, and obtain the spatial distribution of single-pixel events at a sub-pixel scale. The standard deviation of charge clouds of 5.0 keV X-ray is estimated to be $\sigma_{\rm cloud} = 4.30 \pm 0.07$ $\mu$m. Compared to the detector response simulation, the estimated charge cloud size is well explained by a combination of photoelectron range, thermal diffusion, and Coulomb repulsion. Moreover, by analyzing the fraction of multi-pixel events in various energies, we find that the energy dependence of the charge cloud size is also consistent with the simulation.

We have been developing a monolithic active pixel sensor, ``XRPIX``, for the Japan led future X-ray astronomy mission ``FORCE`` observing the X-ray sky in the energy band of 1-80 keV with angular resolution of better than 15``. XRPIX is an upper part of a stack of two sensors of an imager system onboard FORCE, and covers the X-ray energy band lower than 20 keV. The XRPIX device consists of a fully depleted high-resistivity silicon sensor layer for X-ray detection, a low resistivity silicon layer for CMOS readout circuit, and a buried oxide layer in between, which is fabricated with 0.2 $\mu$ m CMOS silicon-on-insulator (SOI) technology. Each pixel has a trigger circuit with which we can achieve a 10 $\mu$ s time resolution, a few orders of magnitude higher than that with X-ray astronomy CCDs. We recently introduced a new type of a device structure, a pinned depleted diode (PDD), in the XRPIX device, and succeeded in improving the spectral performance, especially in a readout mode using the trigger function. In this paper, we apply a mesh experiment to the XRPIX devices for the first time in order to study the spectral response of the PDD device at the subpixel resolution. We confirmed that the PDD structure solves the significant degradation of the charge collection efficiency at the pixel boundaries and in the region under the pixel circuits, which is found in the single SOI structure, the conventional type of the device structure. On the other hand, the spectral line profiles are skewed with low energy tails and the line peaks slightly shift near the pixel boundaries, which contribute to a degradation of the energy resolution.

We have been developing monolithic active pixel sensors, named ``XRPIX'', based on the silicon-on-insulator (SOI) pixel technology for future X-ray astronomy satellites. XRPIX has the function of event trigger and hit address outputs. This function allows us to read out analog signals only of hit pixels on trigger timing, which is referred to as the event-driven readout mode. Recently, we processed ``XRPIX5b'' with the largest imaging area of 21.9~mm $\times$ 13.8~mm in the XRPIX series. X-ray spectra are successfully obtained from all the pixels, and the readout noise is 46~e$^-$~(rms) in the frame readout mode. The gain variation was measured to be 1.2\%~(FWHM) among the pixels. We successfully obtain the X-ray image in the event-driven readout mode.

We present a 190 ks observation of the Galactic supernova remnant (SNR) G306.3-0.9 with Suzaku. To study ejecta properties of this possible Type Ia SNR, the absolute energy scale at the Fe-K band was calibrated to a level of uncertainty less than 10 eV by a cross-calibration with the Hitomi microcalorimeter using the Perseus cluster spectra. This enabled us for the first time to accurately determine the ionization state of the Fe K$\alpha$ line of this SNR. The ionization timescale ($\tau$) of the Fe ejecta was measured to be $\log_{10} \tau$ (cm$^{-3}$ s) $=10.24\pm0.03$, significantly smaller than previous measurements. Marginally detected K$\alpha$ lines of Cr and Mn have consistent ionization timescales with Fe. The global spectrum was well fitted with shocked interstellar matter (ISM) and at least two ejecta components with different ionization timescales for Fe and intermediate mass elements (IME) such as S and Ar. One plausible interpretation of the one-order-of-magnitude shorter timescale of Fe than that of IME ($\log_{10} \tau = 11.17\pm0.07$) is a chemically stratified structure of ejecta. By comparing the X-ray absorption column to the HI distribution decomposed along the line of sight, we refined the distance to be $\sim$20 kpc. The large ISM-to-ejecta shocked mass ratio of $\sim$100 and dynamical timescale of $\sim$6 kyr place the SNR in the late Sedov phase. These properties are consistent with a stratified ejecta structure that has survived the mixing processes expected in an evolved supernova remnant.

We carried out new $^{12}$CO($J$ = 1-0, 3-2) observations of a N63A supernova remnant (SNR) from the LMC using ALMA and ASTE. We find three giant molecular clouds toward the northeast, east, and near the center of the SNR. Using the ALMA data, we spatially resolved clumpy molecular clouds embedded within the optical nebulae in both the shock-ionized and photoionized lobes discovered by previous H$\alpha$ and [S II] observations. The total mass of the molecular clouds is $\sim$$800$ $M_{\odot}$ for the shock-ionized region and $\sim$$1700$ $M_{\odot}$ for the photoionized region. Spatially resolved X-ray spectroscopy reveals that the absorbing column densities toward the molecular clouds are $\sim$$1.5$-$6.0\times10^{21}$ cm$^{-2}$, which are $\sim$$1.5$-$15$ times less than the averaged interstellar proton column densities for each region. This means that the X-rays are produced not only behind the molecular clouds, but also in front of them. We conclude that the dense molecular clouds have been completely engulfed by the shock waves, but have still survived erosion owing to their high-density and short interacting time. The X-ray spectrum toward the gas clumps is well explained by an absorbed power-law or high-temperature plasma models in addition to the thermal plasma components, implying that the shock-cloud interaction is efficiently working for both the cases through the shock ionization and magnetic field amplification. If the hadronic gamma-ray is dominant in the GeV band, the total energy of cosmic-ray protons is calculated to be $\sim$$0.3$-$1.4\times10^{49}$ erg with the estimated ISM proton density of $\sim$$190\pm90$ cm$^{-3}$, containing both the shock-ionized gas and neutral atomic hydrogen.

We have been developing monolithic active pixel sensors for X-rays based on the silicon-on-insulator technology. Our device consists of a low-resistivity Si layer for readout CMOS electronics, a high-resistivity Si sensor layer, and a SiO$_2$ layer between them. This configuration allows us both high-speed readout circuits and a thick (on the order of $100~\mu{\rm m}$) depletion layer in a monolithic device. Each pixel circuit contains a trigger output function, with which we can achieve a time resolution of $\lesssim 10~\mu{\rm s}$. One of our key development items is improvement of the energy resolution. We recently fabricated a device named XRPIX6E, to which we introduced a pinned depleted diode (PDD) structure. The structure reduces the capacitance coupling between the sensing area in the sensor layer and the pixel circuit, which degrades the spectral performance. With XRPIX6E, we achieve an energy resolution of $\sim 150$~eV in full width at half maximum for 6.4-keV X-rays. In addition to the good energy resolution, a large imaging area is required for practical use. We developed and tested XRPIX5b, which has an imaging area size of $21.9~{\rm mm} \times 13.8~{\rm mm}$ and is the largest device that we ever fabricated. We successfully obtain X-ray data from almost all the $608 \times 384$ pixels with high uniformity.

We have been developing event-driven SOI Pixel Detectors, named `XRPIX' (X-Ray soiPIXel) based on the silicon-on-insulator (SOI) pixel technology, for the future X-ray astronomical satellite with wide band coverage from 0.5 keV to 40 keV. XRPIX has event trigger output function at each pixel to acquire a good time resolution of a few $\mu \rm s$ and has Correlated Double Sampling function to reduce electric noises. The good time resolution enables the XRPIX to reduce Non X-ray Background in the high energy band above 10\,keV drastically by using anti-coincidence technique with active shield counters surrounding XRPIX. In order to increase the soft X-ray sensitivity, it is necessary to make the dead layer on the X-ray incident surface as thin as possible. Since XRPIX1b, which is a device at the initial stage of development, is a front-illuminated (FI) type of XRPIX, low energy X-ray photons are absorbed in the 8 $\rm \mu$m thick circuit layer, lowering the sensitivity in the soft X-ray band. Therefore, we developed a back-illuminated (BI) device XRPIX2b, and confirmed high detection efficiency down to 2.6 keV, below which the efficiency is affected by the readout noise. In order to further improve the detection efficiency in the soft X-ray band, we developed a back-illuminated device XRPIX3b with lower readout noise. In this work, we irradiated 2--5 keV X-ray beam collimated to 4 $\rm \mu m \phi$ to the sensor layer side of the XRPIX3b at 6 $\rm \mu m$ pitch. In this paper, we reported the uniformity of the relative detection efficiency, gain and energy resolution in the subpixel level for the first time. We also confirmed that the variation in the relative detection efficiency at the subpixel level reported by Matsumura et al. has improved.

In low earth orbit, there are many cosmic rays composed primarily of high energy protons. These cosmic rays cause surface and bulk radiation effects, resulting in degradation of detector performance. Quantitative evaluation of radiation hardness is essential in development of X-ray detectors for astronomical satellites. We performed proton irradiation experiments on newly developed X-ray detectors called XRPIX based on silicon-on-insulator technology at HIMAC in National Institute of Radiological Sciences. We irradiated 6 MeV protons with a total dose of 0.5 krad, equivalent to 6 years irradiation in orbit. As a result, the gain increases by 0.2% and the energy resolution degrades by 0.5%. Finally we irradiated protons up to 20 krad and found that detector performance degraded significantly at 5 krad. With 5 krad irradiation corresponding to 60 years in orbit, the gain increases by 0.7% and the energy resolution worsens by 10%. By decomposing into noise components, we found that the increase of the circuit noise is dominant in the degradation of the energy resolution.

We present an X-ray study of the mixed-morphology supernova remnant CTB 1 (G116.9+0.2) observed with Suzaku. The 0.6-2.0 keV spectra in the northeast breakout region of CTB 1 are well represented by a collisional ionization-equilibrium plasma model with an electron temperature of ~ 0.3 keV, whereas those in the southwest inner-shell region can be reproduced by a recombining plasma model with an electron temperature of ~ 0.2 keV, an initial ionization temperature of ~ 3 keV, and an ionization parameter of ~ 9 $\times$ 10$^{11}$ cm$^{-3}$s. This is the first detection of the recombining plasma in CTB 1. The electron temperature in the inner-shell region decreases outwards, which implies that the recombining plasma is likely formed by the thermal conduction via interaction with the surrounding cold interstellar medium. The Ne abundance is almost uniform in the observed regions whereas Fe is more abundant toward the southwest of the remnant, suggesting an asymmetric ejecta distribution. We also detect a hard tail above the 2 keV band that is fitted with a power-law function with a photon index of 2-3. The flux of the hard tail in the 2-10 keV band is ~ 5 $\times$ 10$^{-13}$ erg cm$^{-2}$ s$^{-1}$ and is peaked at the center of CTB 1. Its origin is unclear but one possibility is a putative pulsar wind nebula associated with CTB 1.

We have been developing event driven X-ray Silicon-On-Insulator (SOI) pixel sensors, called "XRPIX", for the next generation of X-ray astronomy satellites. XRPIX is a monolithic active pixel sensor, fabricated using the SOI CMOS technology, and is equipped with the so-called "Event-Driven readout", which allows reading out only hit pixels by using the trigger circuit implemented in each pixel. The current version of XRPIX has lower spectral performance in the Event-Driven readout mode than in the Frame readout mode, which is due to the interference between the sensor layer and the circuit layer. The interference also lowers the gain. In order to suppress the interference, we developed a new device, "XRPIX6E" equipped with the Pinned Depleted Diode structure. A sufficiently highly-doped buried p-well is formed at the interface between the buried oxide layer and the sensor layer, and acts as a shield layer. XRPIX6E exhibits improved spectral performances both in the Event-Driven readout mode and in the Frame readout mode in comparison to previous devices. The energy resolutions in full width at half maximum at 6.4 keV are 236 $\pm$ 1 eV and 335 $\pm$ 4 eV in the Frame and Event-Driven readout modes, respectively. There are differences between the readout noise and the spectral performance in the two modes, which suggests that some mechanism still degrades the performance in the Event-Driven readout mode.

We have been developing monolithic active pixel sensors, X-ray Astronomy SOI pixel sensors, XRPIXs, based on a Silicon-On-Insulator (SOI) CMOS technology as soft X-ray sensors for a future Japanese mission, FORCE (Focusing On Relativistic universe and Cosmic Evolution). The mission is characterized by broadband (1-80 keV) X-ray imaging spectroscopy with high angular resolution ($<15$~arcsec), with which we can achieve about ten times higher sensitivity in comparison to the previous missions above 10~keV. Immediate readout of only those pixels hit by an X-ray is available by an event trigger output function implemented in each pixel with the time resolution higher than $10~{\rm \mu sec}$ (Event-Driven readout mode). It allows us to do fast timing observation and also reduces non-X-ray background dominating at a high X-ray energy band above 5--10~keV by adopting an anti-coincidence technique. In this paper, we introduce our latest results from the developments of the XRPIXs. (1) We successfully developed a 3-side buttable back-side illumination device with an imaging area size of 21.9~mm$\times$13.8~mm and an pixel size of $36~{\rm \mu m} \times 36~{\rm \mu m}$. The X-ray throughput with the device reaches higher than 0.57~kHz in the Event-Driven readout mode. (2) We developed a device using the double SOI structure and found that the structure improves the spectral performance in the Event-Driven readout mode by suppressing the capacitive coupling interference between the sensor and circuit layers. (3) We also developed a new device equipped with the Pinned Depleted Diode structure and confirmed that the structure reduces the dark current generated at the interface region between the sensor and the SiO$_2$ insulator layers. The device shows an energy resolution of 216~eV in FWHM at 6.4~keV in the Event-Driven readout mode.

The young shell-type supernova remnant (SNR) RX J1713.7-3946 has been studied as a suitable target to test the SNR paradigm for the origin of Galactic cosmic rays. We present a spatially resolved spectroscopy of the nonthermal X-ray emission in RX J1713.7-3946 with Chandra. In order to obtain X-ray properties of the filamentary structures and their surrounding regions, we divide the southeastern (SE), southwestern (SW), and northwestern (NW) parts of the SNR into subregions on the typical order of several 10" and extract spectra from each subregion. Their photon indices are significantly different among the subregions with a range of 1.8 < {\Gamma} < 3. In the SE part, the clear filaments are harder ({\Gamma} ~ 2.0) than the surrounding regions. This is a common feature often observed in young SNRs and naturally interpreted as a consequence of synchrotron cooling. On the other hand, the bright filamentary regions do not necessarily coincide with the hardest regions in the SW and NW parts. We also find the SW filamentary region is rather relatively soft ({\Gamma} ~ 2.7). In addition, we find that hard regions with photon indices of 2.0-2.2 exist around the bright emission although they lie in the downstream region and does not appear to be the blast wave shock front. Both two aforementioned characteristic regions in SW are located close to peaks of the interstellar gas. We discuss possible origins of the spatial variation of the photon indices, paying particular attention to the shock-cloud interactions.

Overionized recombining plasmas (RPs) have been discovered from a dozen of mixed- morphology (MM) supernova remnants (SNRs). However their formation process is still under debate. As pointed out by many previous studies, spatial variations of plasma temperature and ionization state provide clues to understand the physical origin of RPs. We report on a spatially resolved X-ray spectroscopy of W28, which is one of the largest MM SNRs found in our Galaxy. Two observations with Suzaku XIS cover the center of W28 to the northeastern rim where the shock is interacting with molecular clouds. The X-ray spectra in the inner regions are well reproduced by a combination of two-RP model with different temperatures and ionization states, whereas that in northeastern rim is explained with a single-RP model. Our discovery of the RP in the northeastern rim suggests an effect of thermal conduction between the cloud and hot plasma, which may be the production process of the RP. The X-ray spectrum of the north- eastern rim also shows an excess emission of the Fe I K{\alpha} line. The most probable process to explain the line would be inner shell ionization of Fe in the molecular cloud by cosmic-ray particles accelerated in W28.

We perform a spatially resolved spectroscopic analysis of X-ray emission from the supernova remnant (SNR) IC 443 with Suzaku. All the spectra are well reproduced by a model consisting of a collisional ionization equilibrium (CIE) and two recombining plasma (RP) components. Although previous X-ray studies found an RP in the northeastern region, this is the first report on RPs in the other parts of the remnant. The electron temperature $kT_e$ of the CIE component is almost uniform at $\sim 0.2$ keV across the remnant. The CIE plasma has metal abundances consistent with solar and is concentrated toward the rim of the remnant, suggesting that it is of shocked interstellar medium origin. The two RP components have different $kT_e$: one in the range of 0.16$-$0.28 keV and the other in the range of 0.48$-$0.67 keV. The electron temperatures of both RP components decrease toward the southeast, where the SNR shock is known to be interacting with a molecular cloud. We also find the normalization ratio of the lower-$kT_e$ RP to higher-$kT_e$ RP components increases toward the southeast. Both results suggest the X-ray emitting plasma in the southeastern region is significantly cooled by some mechanism. One of the plausible cooling mechanisms is thermal conduction between the hot plasma and the molecular cloud. If the cooling proceeds faster than the recombination timescale of the plasma, the same mechanism can account for the recombining plasma as well.

We observed the Galactic mixed-morphology supernova remnant G166.0+4.3 with Suzaku. The X-ray spectrum in the western part of the remnant is well represented by a one-component ionizing plasma model. The spectrum in the northeastern region can be explained by two components. One is the Fe-rich component with the electron temperature $kT_e = 0.87_{-0.03}^{+0.02}$ keV. The other is the recombining plasma component of lighter elements with $kT_e = 0.46\pm0.03$ keV, the initial temperature $kT_{init} = 3$ keV (fixed) and the ionization parameter $n_et = (6.1_{-0.4}^{+0.5}) \times 10^{11} \rm cm^{-3} s$. As the formation process of the recombining plasma, two scenarios, the rarefaction and thermal conduction, are considered. The former would not be favored since we found the recombining plasma only in the northeastern region whereas the latter would explain the origin of the RP. In the latter scenario, an RP is anticipated in a part of the remnant where blast waves are in contact with cool dense gas. The emission measure suggests higher ambient gas density in the northeastern region. The morphology of the radio shell and a GeV gamma-ray emission also suggest a molecular cloud in the region.

We have been developing X-ray SOI pixel Sensors, called "XRPIX", for future X-ray astronomy satellites that enable us to observe in the wide energy band of 0.5-40 keV. Since XRPIXs have the circuitry layer with a thickness of about 8 {\mu}m in the front side of the sensor, it is impossible to detect low energy X-rays with a front-illuminated type. So, we have been developing back-illuminated type of XRPIX with a less 1 {\mu}m dead layer in the back-side, which enables the sensitivity to reach 0.5 keV. We produced two types of back-side illuminated (BI) XRPIXs, one of which is produced in "Pizza process" which LBNL developed and the other is processed in the ion implantation and laser annealing. We irradiated both of the BI-XRPIXs with soft X-ray and investigate soft X-ray performance of them. We report results from soft X-ray evaluation test of the device.

We have been developing monolithic active pixel sensors series, named "XRPIX," based on the silicon-on-insulator (SOI) pixel technology, for future X-ray astronomical satellites. The XRPIX series offers high coincidence time resolution ({\rm \sim}1 {\rm \mu}s), superior readout time ({\rm \sim}10 {\rm \mu}s), and a wide energy range (0.5--40 keV). In the previous study, we successfully demonstrated X-ray detection by event-driven readout of XRPIX2b. We here report recent improvements in spectroscopic performance. We successfully increased the gain and reduced the readout noise in XRPIX2b by decreasing the parasitic capacitance of the sense-node originated in the buried p-well (BPW). On the other hand, we found significant tail structures in the spectral response due to the loss of the charge collection efficiency when a small BPW is employed. Thus, we increased the gain in XRPIX3b by introducing in-pixel charge sensitive amplifiers instead of having even smaller BPW. We finally achieved the readout noise of 35 e{\rm ^{-}} (rms) and the energy resolution of 320 eV (FWHM) at 6 keV without significant loss of the charge collection efficiency.

We propose a light dark matter search experiment using an SOI pixel detector (SOIPIX). The event-driven SOIPIX can be a powerful tool for detecting light WIMPs because of its low energy threshold (< 1 keV) and high timing resolution (few {\mu}s). In this study, we evaluate the performance of an SOIPIX prototype detector and we examine the required specifications of SOIPIX for our target sensitivity.

We have been developing monolithic active pixel sensors, known as Kyoto's X-ray SOIPIXs, based on the CMOS SOI (silicon-on-insulator) technology for next-generation X-ray astronomy satellites. The event trigger output function implemented in each pixel offers microsecond time resolution and enables reduction of the non-X-ray background that dominates the high X-ray energy band above 5--10 keV. A fully depleted SOI with a thick depletion layer and back illumination offers wide band coverage of 0.3--40 keV. Here, we report recent progress in the X-ray SOIPIX development. In this study, we achieved an energy resolution of 300~eV (FWHM) at 6~keV and a read-out noise of 33~e- (rms) in the frame readout mode, which allows us to clearly resolve Mn-K$\alpha$ and K$\beta$. Moreover, we produced a fully depleted layer with a thickness of $500~{\rm \mu m}$. The event-driven readout mode has already been successfully demonstrated.