We are developing an ultra-wideband spectroscopic instrument, DESHIMA (DEep Spectroscopic HIgh-redshift MApper), based on the technologies of an on-chip filter-bank and Microwave Kinetic Inductance Detector (MKID) to investigate dusty star-burst galaxies in the distant universe at millimeter and submillimeter wavelength. An on-site experiment of DESHIMA was performed using the ASTE 10-m telescope. We established a responsivity model that converts frequency responses of the MKIDs to line-of-sight brightness temperature. We estimated two parameters of the responsivity model using a set of skydip data taken under various precipitable water vapor (PWV, 0.4-3.0 mm) conditions for each MKID. The line-of-sight brightness temperature of sky is estimated using an atmospheric transmission model and the PWVs. As a result, we obtain an average temperature calibration uncertainty of $1\sigma=4$%, which is smaller than other photometric biases. In addition, the average forward efficiency of 0.88 in our responsivity model is consistent with the value expected from the geometrical support structure of the telescope. We also estimate line-of-sight PWVs of each skydip observation using the frequency response of MKIDs, and confirm the consistency with PWVs reported by the Atacama Large Millimeter/submillimeter Array.

Ultra-wideband 3D imaging spectrometry in the millimeter-submillimeter (mm-submm) band is an essential tool for uncovering the dust-enshrouded portion of the cosmic history of star formation and galaxy evolution. However, it is challenging to scale up conventional coherent heterodyne receivers or free-space diffraction techniques to sufficient bandwidths ($\geq$1 octave) and numbers of spatial pixels (>$10^2$). Here we present the design and first astronomical spectra of an intrinsically scalable, integrated superconducting spectrometer, which covers 332-377 GHz with a spectral resolution of $F/\Delta F \sim 380$. It combines the multiplexing advantage of microwave kinetic inductance detectors (MKIDs) with planar superconducting filters for dispersing the signal in a single, small superconducting integrated circuit. We demonstrate the two key applications for an instrument of this type: as an efficient redshift machine, and as a fast multi-line spectral mapper of extended areas. The line detection sensitivity is in excellent agreement with the instrument design and laboratory performance, reaching the atmospheric foreground photon noise limit on sky. The design can be scaled to bandwidths in excess of an octave, spectral resolution up to a few thousand and frequencies up to $\sim$1.1 THz. The miniature chip footprint of a few $\mathrm{cm^2}$ allows for compact multi-pixel spectral imagers, which would enable spectroscopic direct imaging and large volume spectroscopic surveys that are several orders of magnitude faster than what is currently possible.

Terahertz spectrometers with a wide instantaneous frequency coverage for passive remote sensing are enormously attractive for many terahertz applications, such as astronomy, atmospheric science and security. Here we demonstrate a wide-band terahertz spectrometer based on a single superconducting chip. The chip consists of an antenna coupled to a transmission line filterbank, with a microwave kinetic inductance detector behind each filter. Using frequency division multiplexing, all detectors are read-out simultaneously creating a wide-band spectrometer with an instantaneous bandwidth of 45 GHz centered around 350 GHz. The spectrometer has a spectral resolution of $F/\Delta F=380$ and reaches photon-noise limited sensitivity. We discuss the chip design and fabrication, as well as the system integration and testing. We confirm full system operation by the detection of an emission line spectrum of methanol gas. The proposed concept allows for spectroscopic radiation detection over large bandwidths and resolutions up to $F/\Delta F\sim1000$, all using a chip area of a few $\mathrm{cm^2}$. This will allow the construction of medium resolution imaging spectrometers with unprecedented speed and sensitivity.

For space observatories, the glitches caused by high energy phonons created by the interaction of cosmic ray particles with the detector substrate lead to dead time during observation. Mitigating the impact of cosmic rays is therefore an important requirement for detectors to be used in future space missions. In order to investigate possible solutions, we carry out a systematic study by testing four large arrays of Microwave Kinetic Inductance Detectors (MKIDs), each consisting of $\sim$960 pixels and fabricated on monolithic 55 mm $\times$ 55 mm $\times$ 0.35 mm Si substrates. We compare the response to cosmic ray interactions in our laboratory for different detector arrays: A standard array with only the MKID array as reference; an array with a low $T_c$ superconducting film as phonon absorber on the opposite side of the substrate; and arrays with MKIDs on membranes. The idea is that the low $T_c$ layer down-converts the phonon energy to values below the pair breaking threshold of the MKIDs, and the membranes isolate the sensitive part of the MKIDs from phonons created in the substrate. We find that the dead time can be reduced up to a factor of 40 when compared to the reference array. Simulations show that the dead time can be reduced to below 1 % for the tested detector arrays when operated in a spacecraft in an L2 or a similar far-Earth orbit. The technique described here is also applicable and important for large superconducting qubit arrays for future quantum computers.

With increasing array size, it is increasingly important to control stray radiation inside the detector chips themselves. We demonstrate this effect with focal plane arrays of absorber coupled Lumped Element microwave Kinetic Inductance Detectors (LEKIDs) and lens-antenna coupled distributed quarter wavelength Microwave Kinetic Inductance Detectors (MKIDs). In these arrays the response from a point source at the pixel position is at a similar level to the stray response integrated over the entire chip area. For the antenna coupled arrays, we show that this effect can be suppressed by incorporating an on-chip stray light absorber. A similar method should be possible with the LEKID array, especially when they are lens coupled.

Large ultra-sensitive detector arrays are needed for present and future observatories for far infra-red, submillimeter wave (THz), and millimeter wave astronomy. With increasing array size, it is increasingly important to control stray radiation inside the detector chips themselves, the surface wave. We demonstrate this effect with focal plane arrays of 880 lens-antenna coupled Microwave Kinetic Inductance Detectors (MKIDs). Presented here are near field measurements of the MKID optical response versus the position on the array of a reimaged optical source. We demonstrate that the optical response of a detector in these arrays saturates off-pixel at the $\sim-30$ dB level compared to the peak pixel response. The result is that the power detected from a point source at the pixel position is almost identical to the stray response integrated over the chip area. With such a contribution, it would be impossible to measure extended sources, while the point source sensitivity is degraded due to an increase of the stray loading. However, we show that by incorporating an on-chip stray light absorber, the surface wave contribution is reduced by a factor $>$10. With the on-chip stray light absorber the point source response is close to simulations down to the $\sim-35$ dB level, the simulation based on an ideal Gaussian illumination of the optics. In addition, as a crosscheck we show that the extended source response of a single pixel in the array with the absorbing grid is in agreement with the integral of the point source measurements.

Future astrophysics and cosmic microwave background space missions operating in the far-infrared to millimetre part of the spectrum will require very large arrays of ultra-sensitive detectors in combination with high multiplexing factors and efficient low-noise and low-power readout systems. We have developed a demonstrator system suitable for such applications. The system combines a 961 pixel imaging array based upon Microwave Kinetic Inductance Detectors (MKIDs) with a readout system capable of reading out all pixels simultaneously with only one readout cable pair and a single cryogenic amplifier. We evaluate, in a representative environment, the system performance in terms of sensitivity, dynamic range, optical efficiency, cosmic ray rejection, pixel-pixel crosstalk and overall yield at at an observation centre frequency of 850 GHz and 20% fractional bandwidth. The overall system has an excellent sensitivity, with an average detector sensitivity NEPdet=3x10^-19 W/rt(Hz) measured using a thermal calibration source. At a loading power per pixel of 50fW we demonstrate white, photon noise limited detector noise down to 300 mHz. The dynamic range would allow the detection of 1 Jy bright sources within the field of view without tuning the readout of the detectors. The expected dead time due to cosmic ray interactions, when operated in an L2 or a similar far-Earth orbit, is found to be <4%. Additionally, the achieved pixel yield is 83% and the crosstalk between the pixels is <-30dB. This demonstrates that MKID technology can provide multiplexing ratios on the order of a 1000 with state-of-the-art single pixel performance, and that the technology is now mature enough to be considered for future space based observatories and experiments.

Uniformity in thickness and electronic properties of superconducting niobium titanium nitride (NbTiN) thin films is a critical issue for upscaling superconducting electronics, such as microwave kinetic inductance detectors for submillimeter wave astronomy. In this article we make an experimental comparison between the uniformity of NbTiN thin films produced by two DC magnetron sputtering systems with vastly different target sizes: the Nordiko 2000 equipped with a circular 100mm diameter target, and the Evatec LLS801 with a rectangular target of 127 mm x 444.5 mm. In addition to the films deposited staticly in both systems, we have also deposited films in the LLS801 while shuttling the substrate in front of the target, with the aim of further enhancing the uniformity. Among these three setups, the LLS801 system with substrate shuttling has yielded the highest uniformity in film thickness (+/-2%), effective resistivity (decreasing by 5% from center to edge), and superconducting critical temperature (T_c = 15.0 K - 15.3 K) over a 100 mm diameter wafer. However, the shuttling appears to increase the resistivity by almost a factor of 2 compared to static deposition. Surface SEM inspections suggest that the shuttling could have induced a different mode of microstructural film growth.

The superconducting critical temperature (Tc > 15K) of niobium titanium nitride (NbTiN) thin films allows for low-loss circuits up to 1.1 THz, enabling on-chip spectroscopy and multi-pixel imaging with advanced detectors. The drive for large scale detector microchips is demanding NbTiN films with uniform properties over an increasingly larger area. This article provides an experimental comparison between two reactive d.c. sputter systems with different target sizes: a small target (100mm diameter) and a large target (127 mm x 444.5 mm). This article focuses on maximizing the Tc of the films and the accompanying I-V characteristics of the sputter plasma, and we find that both systems are capable of depositing films with Tc > 15 K. The resulting film uniformity is presented in a second manuscript in this volume. We find that these films are deposited within the transition from metallic to compound sputtering, at the point where target nitridation most strongly depends on nitrogen flow. Key in the deposition optimization is to increase the system's pumping speed and gas flows to counteract the hysteretic effects induced by the target size. Using the I-V characteristics as a guide proves to be an effective way to optimize a reactive sputter system, for it can show whether the optimal deposition regime is hysteresis-free and accessible.

We experimentally demonstrate the principle of an on-chip submillimeter wave filter bank spectrometer, using superconducting microresonators as narrow band-separation filters. The filters are made of NbTiN/SiNx/NbTiN microstrip line resonators, which have a resonance frequency in the range of 614-685 GHz---two orders of magnitude higher in frequency than what is currently studied for use in circuit quantum electrodynamics and photodetectors. The frequency resolution of the filters decreases from 350 to 140 with increasing frequency, most likely limited by dissipation of the resonators.