We report here the in orbit performance of the CCD camera (MAXI/SSC) onboard the International Space Station (ISS). It was commissioned in August, 2009. This is the first all-sky survey mission employing X-ray CCDs. It consists of 32 CCDs each of which is 1 inch square. It is a slit camera with a field of view of 1deg.5x 90deg and scans the sky as the rotation of the ISS. The CCD on the SSC is cooled down to the working temperature around -60degC by the combination of the peltier cooler, a loop heat pipe and a radiator. The standard observation mode of the CCD is in a parallel sum mode (64-binning). The CCD functions properly although it suffers an edge glow when the Sun is near the field of view (FOV) which reduces the observation efficiency of the SSC down to about 30%. The performance of the CCD is continuously monitored both by the Mn-K X-rays and by the Cu-K X-rays. There are many sources detected, not only point sources but extended sources. Due to the lack of the effective observation time, we need more observation time to obtain an extended emission analysis extraction process.

Solid-state Slit Camera (SSC) is an X-ray camera onboard the MAXI mission of the International Space Station. Two sets of SSC sensors view X-ray sky using charge-coupled devices (CCDs) in 0.5--12\,keV band. The total area for the X-ray detection is about 200\,cm$\rm ^2$ which is the largest among the missions of X-ray astronomy. The energy resolution at the CCD temperature of $-$70 \degc is 145\,eV in full width at the half maximum (FWHM) at 5.9\,keV, and the field of view is 1\deg .5 (FWHM) $\times$ 90\deg for each sensor. The SSC could make a whole-sky image with the energy resolution good enough to resolve line emissions, and monitor the whole-sky at the energy band of $<$ 2\,keV for the first time in these decades.

NeXT (New X-ray Telescope) is the next Japanese X-ray astronomical satellite mission after the Suzaku satellite. NeXT aims to perform wide band imaging spectroscopy. Due to the successful development of a multilayer coated mirror, called a supermirror, NeXT can focus X-rays in the energy range from 0.1 keV up to 80 keV. To cover this wide energy range, we are in the process of developing a hybrid X-ray camera, Wideband X-ray Imager (WXI) as a focal plane detector of the supermirror. The WXI consists of X-ray CCDs (SXI) and CdTe pixelized detectors (HXI), which cover the lower and higher X-ray energy bands of 0.1-80 keV, respectively. The X-ray CCDs of the SXI are stacked above the CdTe pixelized detectors of the HXI. The X-ray CCDs of the SXI detect soft X-rays below $\sim$ 10 keV and allow hard X-rays pass into the CdTe detectors of the HXI without loss. Thus, we have been developing a "back-supportless CCD" with a thick depletion layer, a thinned silicon wafer, and a back-supportless structure. In this paper, we report the development and performances of an evaluation model of CCD for the SXI, "CCD-NeXT1". We successfully fabricated two types of CCD-NeXT1, unthinned CCDs with 625-um thick wafer and 150-um thick thinned CCDs. By omitting the polishing process when making the thinned CCDs, we confirmed that the polishing process does not impact the X-ray performance. In addition, we did not find significant differences in the X-ray performance between the two types of CCDs. The energy resolution and readout noise are $\sim$ 140 eV (FWHM) at 5.9 keV and $\sim$5 electrons (RMS), respectively. The estimated thickness of the depletion layer is $\sim$80 um. The performances almost satisfy the requirements of the baseline plan of the SXI.

We have investigated the radiation damage effects on a CCD to be employed in the Japanese X-ray astronomy mission including the Monitor of All-sky X-ray Image (MAXI) onboard the International Space Station (ISS). Since low energy protons release their energy mainly at the charge transfer channel, resulting a decrease of the charge transfer efficiency, we thus focused on the low energy protons in our experiments. A 171 keV to 3.91 MeV proton beam was irradiated to a given device. We measured the degradation of the charge transfer inefficiency (CTI) as a function of incremental fluence. A 292 keV proton beam degraded the CTI most seriously. Taking into account the proton energy dependence of the CTI, we confirmed that the transfer channel has the lowest radiation tolerance. We have also developed the different device architectures to reduce the radiation damage in orbit. Among them, the ``notch'' CCD, in which the buried channel implant concentration is increased, resulting in a deeper potential well than outside, has three times higher radiation tolerance than that of the normal CCD. We then estimated the charge transfer inefficiency of the CCD in the orbit of ISS, considering the proton energy spectrum. The CTI value is estimated to be 1.1e-5 per each transfer after two years of mission life in the worse case analysis if the highest radiation-tolerant device is employed. This value is well within the acceptable limit and we have confirmed the high radiation-tolerance of CCDs for the MAXI mission.

We have employed a mesh experiment for back-illuminated (BI) CCDs. BI CCDs possess the same structure to those of FI CCDs. Since X-ray photons enter from the back surface of the CCD, a primary charge cloud is formed far from the electrodes. The primary charge cloud expands through diffusion process until it reaches the potential well that is just below the electrodes. Therefore, the diffusion time for the charge cloud produced is longer than that in the FI CCD, resulting a larger charge cloud shape expected. The mesh experiment enables us to specify the X-ray point of interaction with a subpixel resolution. We then have measured a charge cloud shape produced in the BI CCD. We found that there are two components of the charge cloud shape having different size: a narrow component and a broad component. The size of the narrow component is $2.8-5.7 \mu$m in unit of a standard deviation and strongly depends on the attenuation length in Si of incident X-rays. The shorter the attenuation length of X-rays is, the larger the charge cloud becomes. This result is qualitatively consistent with a diffusion model inside the CCD. On the other hand, the size of the broad component is roughly constant of $\simeq 13 \mu$m and does not depend on X-ray energies. Judging from the design value of the CCD and the fraction of each component, we conclude that the narrow component is originated in the depletion region whereas the broad component is in the field-free region.

A charge-coupled device (CCD) is a standard imager in optical region in which the image quality is limited by its pixel size. CCDs also function in X-ray region but with substantial differences in performance. An optical photon generates only one electron while an X-ray photon generates many electrons at a time. We developed a method to precisely determine the X-ray point of interaction with subpixel resolution. In particular, we found that a back-illuminated CCD efficiently functions as a fine imager. We present here the validity of our method through an actual imaging experiment.