We are developing an ultra-wideband spectroscopic instrument, DESHIMA (DEep Spectroscopic HIgh-redshift MApper), based on the technologies of an on-chip filter-bank and Microwave Kinetic Inductance Detector (MKID) to investigate dusty star-burst galaxies in the distant universe at millimeter and submillimeter wavelength. An on-site experiment of DESHIMA was performed using the ASTE 10-m telescope. We established a responsivity model that converts frequency responses of the MKIDs to line-of-sight brightness temperature. We estimated two parameters of the responsivity model using a set of skydip data taken under various precipitable water vapor (PWV, 0.4-3.0 mm) conditions for each MKID. The line-of-sight brightness temperature of sky is estimated using an atmospheric transmission model and the PWVs. As a result, we obtain an average temperature calibration uncertainty of $1\sigma=4$%, which is smaller than other photometric biases. In addition, the average forward efficiency of 0.88 in our responsivity model is consistent with the value expected from the geometrical support structure of the telescope. We also estimate line-of-sight PWVs of each skydip observation using the frequency response of MKIDs, and confirm the consistency with PWVs reported by the Atacama Large Millimeter/submillimeter Array.

Ultra-wideband 3D imaging spectrometry in the millimeter-submillimeter (mm-submm) band is an essential tool for uncovering the dust-enshrouded portion of the cosmic history of star formation and galaxy evolution. However, it is challenging to scale up conventional coherent heterodyne receivers or free-space diffraction techniques to sufficient bandwidths ($\geq$1 octave) and numbers of spatial pixels (>$10^2$). Here we present the design and first astronomical spectra of an intrinsically scalable, integrated superconducting spectrometer, which covers 332-377 GHz with a spectral resolution of $F/\Delta F \sim 380$. It combines the multiplexing advantage of microwave kinetic inductance detectors (MKIDs) with planar superconducting filters for dispersing the signal in a single, small superconducting integrated circuit. We demonstrate the two key applications for an instrument of this type: as an efficient redshift machine, and as a fast multi-line spectral mapper of extended areas. The line detection sensitivity is in excellent agreement with the instrument design and laboratory performance, reaching the atmospheric foreground photon noise limit on sky. The design can be scaled to bandwidths in excess of an octave, spectral resolution up to a few thousand and frequencies up to $\sim$1.1 THz. The miniature chip footprint of a few $\mathrm{cm^2}$ allows for compact multi-pixel spectral imagers, which would enable spectroscopic direct imaging and large volume spectroscopic surveys that are several orders of magnitude faster than what is currently possible.

Terahertz spectrometers with a wide instantaneous frequency coverage for passive remote sensing are enormously attractive for many terahertz applications, such as astronomy, atmospheric science and security. Here we demonstrate a wide-band terahertz spectrometer based on a single superconducting chip. The chip consists of an antenna coupled to a transmission line filterbank, with a microwave kinetic inductance detector behind each filter. Using frequency division multiplexing, all detectors are read-out simultaneously creating a wide-band spectrometer with an instantaneous bandwidth of 45 GHz centered around 350 GHz. The spectrometer has a spectral resolution of $F/\Delta F=380$ and reaches photon-noise limited sensitivity. We discuss the chip design and fabrication, as well as the system integration and testing. We confirm full system operation by the detection of an emission line spectrum of methanol gas. The proposed concept allows for spectroscopic radiation detection over large bandwidths and resolutions up to $F/\Delta F\sim1000$, all using a chip area of a few $\mathrm{cm^2}$. This will allow the construction of medium resolution imaging spectrometers with unprecedented speed and sensitivity.

Superconducting hot-electron bolometers are presently the best performing mixing devices for the frequency range beyond 1.2 THz, where good quality superconductor-insulator-superconductor (SIS) devices do not exist. Their physical appearance is very simple: an antenna consisting of a normal metal, sometimes a normal metal-superconductor bilayer, connected to a thin film of a narrow, short superconductor with a high resistivity in the normal state. The device is brought into an optimal operating regime by applying a dc current and a certain amount of local- oscillator power. Despite this technological simplicity its operation has been found to be controlled by many different aspects of superconductivity, all occurring simultaneously. A core ingredient is the understanding that there are two sources of resistance in a superconductor: a charge conversion resistance occurring at an normal-metal-superconductor interface and a resistance due to time- dependent changes of the superconducting phase. The latter is responsible for the actual mixing process in a non-uniform superconducting environment set up by the bias-conditions and the geometry. The present understanding indicates that further improvement needs to be found in the use of other materials with a faster energy-relaxation rate. Meanwhile several empirical parameters have become physically meaningful indicators of the devices, which will facilitate the technological developments.

The superconducting critical temperature (Tc > 15K) of niobium titanium nitride (NbTiN) thin films allows for low-loss circuits up to 1.1 THz, enabling on-chip spectroscopy and multi-pixel imaging with advanced detectors. The drive for large scale detector microchips is demanding NbTiN films with uniform properties over an increasingly larger area. This article provides an experimental comparison between two reactive d.c. sputter systems with different target sizes: a small target (100mm diameter) and a large target (127 mm x 444.5 mm). This article focuses on maximizing the Tc of the films and the accompanying I-V characteristics of the sputter plasma, and we find that both systems are capable of depositing films with Tc > 15 K. The resulting film uniformity is presented in a second manuscript in this volume. We find that these films are deposited within the transition from metallic to compound sputtering, at the point where target nitridation most strongly depends on nitrogen flow. Key in the deposition optimization is to increase the system's pumping speed and gas flows to counteract the hysteretic effects induced by the target size. Using the I-V characteristics as a guide proves to be an effective way to optimize a reactive sputter system, for it can show whether the optimal deposition regime is hysteresis-free and accessible.

Uniformity in thickness and electronic properties of superconducting niobium titanium nitride (NbTiN) thin films is a critical issue for upscaling superconducting electronics, such as microwave kinetic inductance detectors for submillimeter wave astronomy. In this article we make an experimental comparison between the uniformity of NbTiN thin films produced by two DC magnetron sputtering systems with vastly different target sizes: the Nordiko 2000 equipped with a circular 100mm diameter target, and the Evatec LLS801 with a rectangular target of 127 mm x 444.5 mm. In addition to the films deposited staticly in both systems, we have also deposited films in the LLS801 while shuttling the substrate in front of the target, with the aim of further enhancing the uniformity. Among these three setups, the LLS801 system with substrate shuttling has yielded the highest uniformity in film thickness (+/-2%), effective resistivity (decreasing by 5% from center to edge), and superconducting critical temperature (T_c = 15.0 K - 15.3 K) over a 100 mm diameter wafer. However, the shuttling appears to increase the resistivity by almost a factor of 2 compared to static deposition. Surface SEM inspections suggest that the shuttling could have induced a different mode of microstructural film growth.

We present a physically consistent interpretation of the dc electrical properties of niobiumnitride (NbN)-based superconducting hot-electron bolometer (HEB-) mixers, using concepts of nonequilibrium superconductivity. Through this we clarify what physical information can be extracted from the resistive transition and the dc current-voltage characteristics, measured at suitably chosen temperatures, and relevant for device characterization and optimization. We point out that the intrinsic spatial variation of the electronic properties of disordered superconductors, such as NbN, leads to a variation from device to device.

We have measured the absorption of terahertz radiation in a BCS superconductor over a broad range of frequencies from 200 GHz to 1.1 THz, using a broadband antenna-lens system and a tantalum microwave resonator. From low frequencies, the response of the resonator rises rapidly to a maximum at the gap edge of the superconductor. From there on the response drops to half the maximum response at twice the pair-breaking energy. At higher frequencies, the response rises again due to trapping of pair-breaking phonons in the superconductor. In practice this is the first measurement of the frequency dependence of the quasiparticle creation efficiency due to pair-breaking in a superconductor. The efficiency, calculated from the different non-equilibrium quasiparticle distribution functions at each frequency, is in agreement with the measurements.

We describe the design, construction, and characterization of the Band 9 heterodyne receivers (600-720 GHz) for the Atacama Large Millimeter / submillimeter Array (ALMA). The ALMA Band 9 receiver units ("cartridges"), which are installed in the telescope's front end, have been designed to detect and down-convert two orthogonal linear polarization components of the light collected by the ALMA antennas. The light entering the front end is refocused with a compact arrangement of mirrors, which is fully contained within the cartridge. The arrangement contains a grid to separate the polarizations and two beam splitters to combine each resulting beam with a local oscillator signal. The combined beams are fed into independent double-sideband mixers, each with a corrugated feedhorn coupling the radiation by way of a waveguide with backshort cavity into an impedance-tuned SIS junction that performs the heterodyne down-conversion. Finally, the generated intermediate frequency signals are amplified by cryogenic and room-temperature HEMT amplifiers and exported to the telescope's back end for further processing and, finally, correlation. The receivers have been constructed and tested in the laboratory and they show excellent performance, complying with ALMA requirements. Performance statistics on all 73 Band 9 receivers are reported. On-sky characterization and tests of the performance of the Band 9 cartridges are presented using commissioning data.

In the next decades millimeter and sub-mm astronomy requires large format imaging arrays and broad-band spectrometers to complement the high spatial and spectral resolution of the Atacama Large Millimeter/sub-millimeter Array. The desired sensors for these instruments should have a background limited sensitivity and a high optical efficiency and enable arrays thousands of pixels in size. Hybrid microwave kinetic inductance detectors consisting of NbTiN and Al have shown to satisfy these requirements. We present the second generation hybrid NbTiN-Al MKIDs, which are photon noise limited in both phase and amplitude readout for loading levels $P_{850GHz} \geq 10$ fW. Thanks to the increased responsivity, the photon noise level achieved in phase allows us to simultaneously read out approximately 8000 pixels using state-of-the-art electronics. In addition, the choice of superconducting materials and the use of a Si lens in combination with a planar antenna gives these resonators the flexibility to operate within the frequency range $0.09 < \nu < 1.1$ THz. Given these specifications, hybrid NbTiN-Al MKIDs will enable astronomically usable kilopixel arrays for sub-mm imaging and moderate resolution spectroscopy.

We demonstrate photon noise limited performance in both phase and amplitude readout in microwave kinetic inductance detectors (MKIDs) consisting of NbTiN and Al, down to 100 fW of optical power. We simulate the far field beam pattern of the lens-antenna system used to couple radiation into the MKID and derive an aperture efficiency of 75%. This is close to the theoretical maximum of 80% for a single-moded detector. The beam patterns are verified by a detailed analysis of the optical coupling within our measurement setup.

We experimentally demonstrate the principle of an on-chip submillimeter wave filter bank spectrometer, using superconducting microresonators as narrow band-separation filters. The filters are made of NbTiN/SiNx/NbTiN microstrip line resonators, which have a resonance frequency in the range of 614-685 GHz---two orders of magnitude higher in frequency than what is currently studied for use in circuit quantum electrodynamics and photodetectors. The frequency resolution of the filters decreases from 350 to 140 with increasing frequency, most likely limited by dissipation of the resonators.

We report on a heterodyne receiver designed to observe the astrophysically important neutral atomic oxygen [OI] line at 4.7448 THz. The local oscillator is a third-order distributed feedback Quantum Cascade Laser operating in continuous wave mode at 4.741 THz. A quasi-optical, superconducting NbN hot electron bolometer is used as the mixer. We recorded a double sideband receiver noise temperature (T^DSB_rec) of 815 K, which is ~7 times the quantum noise limit (h{\nu}/2k_B) and an Allan variance time of 15 s at an effective noise fluctuation bandwidth of 18 MHz. Heterodyne performance was confirmed by measuring a methanol line spectrum.

An integrated filterbank (IFB) in combination with microwave kinetic inductance detectors (MKIDs), both based on superconducting resonators, could be used to make broadband submillimeter imaging spectrographs that are compact and flexible. In order to investigate the possibility of adopting an IFB configuration for DESHIMA (Delft SRON High-redshift Mapper), we study the basic properties of a coplanar-waveguide-based IFB using electromagnetic simulation. We show that a coupling efficiency greater than 1/2 can be achieved if transmission losses are negligible. We arrive at a practical design for a 9 pixel x 920 color 3 dimensional imaging device that fits on a 4 inch wafer, which instantaneously covers multiple submillimeter telluric windows with a dispersion of f/df = 1000.

We have directly measured quasiparticle number fluctuations in a thin film superconducting Al resonator in thermal equilibrium. The spectrum of these fluctuations provides a measure of both the density and the lifetime of the quasiparticles. We observe that the quasiparticle density decreases exponentially with decreasing temperature, as theoretically predicted, but saturates below 160 mK to 25-55 per cubic micron. We show that this saturation is consistent with the measured saturation in the quasiparticle lifetime, which also explains similar observations in qubit decoherence times.

This paper describes a new Heterodyne Array Receiver Programme (HARP) and Auto-Correlation Spectral Imaging System (ACSIS) that have recently been installed and commissioned on the James Clerk Maxwell Telescope (JCMT). The 16-element focal-plane array receiver, operating in the submillimetre from 325 to 375 GHz, offers high (three-dimensional) mapping speeds, along with significant improvements over single-detector counterparts in calibration and image quality. Receiver temperatures are $\sim$120 K across the whole band and system temperatures of $\sim$300K are reached routinely under good weather conditions. The system includes a single-sideband filter so these are SSB figures. Used in conjunction with ACSIS, the system can produce large-scale maps rapidly, in one or more frequency settings, at high spatial and spectral resolution. Fully-sampled maps of size 1 square degree can be observed in under 1 hour. The scientific need for array receivers arises from the requirement for programmes to study samples of objects of statistically significant size, in large-scale unbiased surveys of galactic and extra-galactic regions. Along with morphological information, the new spectral imaging system can be used to study the physical and chemical properties of regions of interest. Its three-dimensional imaging capabilities are critical for research into turbulence and dynamics. In addition, HARP/ACSIS will provide highly complementary science programmes to wide-field continuum studies, and produce the essential preparatory work for submillimetre interferometers such as the SMA and ALMA.