SuperSpec is an on-chip filter-bank spectrometer designed for wideband moderate-resolution spectroscopy at millimeter wavelengths, employing TiN kinetic inductance detectors. SuperSpec technology will enable large-format spectroscopic integral field units suitable for high-redshift line intensity mapping and multi-object spectrographs. In previous results we have demonstrated noise performance in individual detectors suitable for photon noise limited ground-based observations at excellent mm-wave sites. In these proceedings we present the noise performance of a full $R\sim 275$ spectrometer measured using deployment-ready RF hardware and software. We report typical noise equivalent powers through the full device of $\sim 3 \times 10^{-16} \ \mathrm{W}/\sqrt{\mathrm{Hz}}$ at expected sky loadings, which are photon noise dominated. Based on these results, we plan to deploy a six-spectrometer demonstration instrument to the Large Millimeter Telescope in early 2020.

The energy resolution of a single photon counting Microwave Kinetic Inductance Detector (MKID) can be degraded by noise coming from the primary low temperature amplifier in the detector's readout system. Until recently, quantum limited amplifiers have been incompatible with these detectors due to dynamic range, power, and bandwidth constraints. However, we show that a kinetic inductance based traveling wave parametric amplifier can be used for this application and reaches the quantum limit. The total system noise for this readout scheme was equal to ~2.1 in units of quanta. For incident photons in the 800 to 1300 nm range, the amplifier increased the average resolving power of the detector from ~6.7 to 9.3 at which point the resolution becomes limited by noise on the pulse height of the signal. Noise measurements suggest that a resolving power of up to 25 is possible if redesigned detectors can remove this additional noise source.

We are developing lumped-element kinetic inductance detectors (LEKIDs) designed to achieve background-limited sensitivity for far-infrared (FIR) spectroscopy on a stratospheric balloon. The Spectroscopic Terahertz Airborne Receiver for Far-InfraRed Exploration (STARFIRE) will study the evolution of dusty galaxies with observations of the [CII] 158 $\mu$m and other atomic fine-structure transitions at $z=0.5-1.5$, both through direct observations of individual luminous infrared galaxies, and in blind surveys using the technique of line intensity mapping. The spectrometer will require large format ($\sim$1800 detectors) arrays of dual-polarization sensitive detectors with NEPs of $1 \times 10^{-17}$ W Hz$^{-1/2}$. The low-volume LEKIDs are fabricated with a single layer of aluminum (20 nm thick) deposited on a crystalline silicon wafer, with resonance frequencies of $100-250$ MHz. The inductor is a single meander with a linewidth of 0.4 $\mu$m, patterned in a grid to absorb optical power in both polarizations. The meander is coupled to a circular waveguide, fed by a conical feedhorn. Initial testing of a small array prototype has demonstrated good yield, and a median NEP of $4 \times 10^{-18}$ W Hz$^{-1/2}$.

Lumped-element kinetic inductance detectors (LEKIDs) are an attractive technology for millimeter-wave observations that require large arrays of extremely low-noise detectors. We designed, fabricated and characterized 64-element (128 LEKID) arrays of horn-coupled, dual-polarization LEKIDs optimized for ground-based CMB polarimetry. Our devices are sensitive to two orthogonal polarizations in a single spectral band centered on 150 GHz with $\Delta\nu/\nu=0.2$. The $65\times 65$ mm square arrays are designed to be tiled into the focal plane of an optical system. We demonstrate the viability of these dual-polarization LEKIDs with laboratory measurements. The LEKID modules are tested with an FPGA-based readout system in a sub-kelvin cryostat that uses a two-stage adiabatic demagnetization refrigerator. The devices are characterized using a blackbody and a millimeter-wave source. The polarization properties are measured with a cryogenic stepped half-wave plate. We measure the resonator parameters and the detector sensitivity, noise spectrum, dynamic range, and polarization response. The resonators have internal quality factors approaching $1\times 10^{6}$. The detectors have uniform response between orthogonal polarizations and a large dynamic range. The detectors are photon-noise limited above 1 pW of absorbed power. The noise-equivalent temperatures under a 3.4 K blackbody load are $<100~\mu\mathrm{K\sqrt{s}}$. The polarization fractions of detectors sensitive to orthogonal polarizations are >80%. The entire array is multiplexed on a single readout line, demonstrating a multiplexing factor of 128. The array and readout meet the requirements for 4 arrays to be read out simultaneously for a multiplexing factor of 512. This laboratory study demonstrates the first dual-polarization LEKID array optimized for CMB polarimetry and shows the readiness of the detectors for on-sky observations.

We report photon-noise limited performance of horn-coupled, aluminum lumped-element kinetic inductance detectors at millimeter wavelengths. The detectors are illuminated by a millimeter-wave source that uses an active multiplier chain to produce radiation between 140 and 160 GHz. We feed the multiplier with either amplified broadband noise or a continuous-wave tone from a microwave signal generator. We demonstrate that the detector response over a 40 dB range of source power is well-described by a simple model that considers the number of quasiparticles. The detector noise-equivalent power (NEP) is dominated by photon noise when the absorbed power is greater than approximately 1 pW, which corresponds to $\mathrm{NEP} \approx 2 \times 10^{-17} \, \mathrm{W} \, \mathrm{Hz}^{-1/2}$, referenced to absorbed power. At higher source power levels we observe the relationships between noise and power expected from the photon statistics of the source signal: $\mathrm{NEP} \propto P$ for broadband (chaotic) illumination and $\mathrm{NEP} \propto P^{1/2}$ for continuous-wave (coherent) illumination.

We discuss the design considerations and initial measurements from arrays of dual-polarization, lumped element kinetic inductance detectors (LEKIDs) nominally designed for cosmic microwave background (CMB) studies. The detectors are horn-coupled, and each array element contains two single-polarization LEKIDs, which are made from thin-film aluminum and optimized for a single spectral band centered on 150 GHz. We are developing two array architectures, one based on 160 micron thick silicon wafers and the other based on silicon-on-insulator (SOI) wafers with a 30 micron thick device layer. The 20-element test arrays (40 LEKIDs) are characterized with both a linearly-polarized electronic millimeter wave source and a thermal source. We present initial measurements including the noise spectra, noise-equivalent temperature, and responsivity. We discuss future testing and further design optimizations to be implemented.

We present Sunyaev-Zel'dovich (SZ) effect measurements from wide-field images towards the galaxy cluster RX J1347.5-1145 obtained from the Caltech Submillimeter Observatory with the Multiwavelength Submillimeter Inductance Camera (MUSIC) at 147, 213, 281, and 337 GHz and with Bolocam at 140 GHz. As part of our analysis, we have used higher frequency data from Herschel-SPIRE and previously published lower frequency radio data to subtract the signal from the brightest dusty star-forming galaxies behind RX J1347.5-1145 and from the AGN in RX J1347.5-1145's BCG. Using these five-band SZ effect images, combined with X-ray spectroscopic measurements of the temperature of the intra-cluster medium (ICM) from Chandra, we constrain the ICM optical depth to be $\tau_e = 7.33^{+0.96}_{-0.97} \times 10^{-3}$ and the ICM line of sight peculiar velocity to be $v_{pec} = -1040^{+870}_{-840}$ km s$^{-1}$. The errors for both quantities are limited by measurement noise rather than calibration uncertainties or astrophysical contamination, and significant improvements are possible with deeper observations. Our best-fit velocity is in good agreement with one previously published SZ effect analysis and in mild tension with the other, although some or all of that tension may be because that measurement samples a much smaller cluster volume. Furthermore, our best-fit optical depth implies a gas mass slightly larger than the Chandra-derived value, implying the cluster is elongated along the line of sight.

We discuss the design and measured performance of a titanium nitride (TiN) mesh absorber we are developing for controlling optical crosstalk in horn-coupled lumped-element kinetic inductance detector arrays for millimeter-wavelengths. This absorber was added to the fused silica anti-reflection coating attached to previously-characterized, 20-element prototype arrays of LEKIDs fabricated from thin-film aluminum on silicon substrates. To test the TiN crosstalk absorber, we compared the measured response and noise properties of LEKID arrays with and without the TiN mesh. For this test, the LEKIDs were illuminated with an adjustable, incoherent electronic millimeter-wave source. Our measurements show that the optical crosstalk in the LEKID array with the TiN absorber is reduced by 66\% on average, so the approach is effective and a viable candidate for future kilo-pixel arrays.

SuperSpec is a novel on-chip spectrometer we are developing for multi-object, moderate resolution (R = 100 - 500), large bandwidth (~1.65:1) submillimeter and millimeter survey spectroscopy of high-redshift galaxies. The spectrometer employs a filter bank architecture, and consists of a series of half-wave resonators formed by lithographically-patterned superconducting transmission lines. The signal power admitted by each resonator is detected by a lumped element titanium nitride (TiN) kinetic inductance detector (KID) operating at 100 - 200 MHz. We have tested a new prototype device that achieves the targeted R = 100 resolving power, and has better detector sensitivity and optical efficiency than previous devices. We employ a new method for measuring photon noise using both coherent and thermal sources of radiation to cleanly separate the contributions of shot and wave noise. We report an upper limit to the detector NEP of $1.4\times10^{-17}$ W Hz$^{-1/2}$, within 10% of the photon noise limited NEP for a ground-based R=100 spectrometer.

We discuss the design, fabrication, and testing of prototype horn-coupled, lumped-element kinetic inductance detectors (LEKIDs) designed for cosmic microwave background (CMB) studies. The LEKIDs are made from a thin aluminum film deposited on a silicon wafer and patterned using standard photolithographic techniques at STAR Cryoelectronics, a commercial device foundry. We fabricated twenty-element arrays, optimized for a spectral band centered on 150 GHz, to test the sensitivity and yield of the devices as well as the multiplexing scheme. We characterized the detectors in two configurations. First, the detectors were tested in a dark environment with the horn apertures covered, and second, the horn apertures were pointed towards a beam-filling cryogenic blackbody load. These tests show that the multiplexing scheme is robust and scalable, the yield across multiple LEKID arrays is 91%, and the noise-equivalent temperatures (NET) for a 4 K optical load are in the range 26$\thinspace\pm6 \thinspace \mu \mbox{K} \sqrt{\mbox{s}}$.

We have developed antenna-coupled transition-edge sensor (TES) bolometers for a wide range of cosmic microwave background (CMB) polarimetry experiments, including BICEP2, Keck Array, and the balloon borne SPIDER. These detectors have reached maturity and this paper reports on their design principles, overall performance, and key challenges associated with design and production. Our detector arrays repeatedly produce spectral bands with 20%-30% bandwidth at 95, 150, or 220~GHz. The integrated antenna arrays synthesize symmetric co-aligned beams with controlled side-lobe levels. Cross-polarized response on boresight is typically ~0.5%, consistent with cross-talk in our multiplexed readout system. End-to-end optical efficiencies in our cameras are routinely 35% or higher, with per detector sensitivities of NET~300 uKrts. Thanks to the scalability of this design, we have deployed 2560 detectors as 1280 matched pairs in Keck Array with a combined instantaneous sensitivity of ~9 uKrts, as measured directly from CMB maps in the 2013 season. Similar arrays have recently flown in the SPIDER instrument, and development of this technology is ongoing.

SuperSpec is a novel on-chip spectrometer we are developing for multi-object, moderate resolution (R = 100 - 500), large bandwidth (~1.65:1) submillimeter and millimeter survey spectroscopy of high-redshift galaxies. The spectrometer employs a filter bank architecture, and consists of a series of half-wave resonators formed by lithographically-patterned superconducting transmission lines. The signal power admitted by each resonator is detected by a lumped element titanium nitride (TiN) kinetic inductance detector (KID) operating at 100-200 MHz. We have tested a new prototype device that is more sensitive than previous devices, and easier to fabricate. We present a characterization of a representative R=282 channel at f = 236 GHz, including measurements of the spectrometer detection efficiency, the detector responsivity over a large range of optical loading, and the full system optical efficiency. We outline future improvements to the current system that we expect will enable construction of a photon-noise-limited R=100 filter bank, appropriate for a line intensity mapping experiment targeting the [CII] 158 micron transition during the Epoch of Reionization

To use highly resistive material for Kinetic Inductance Detectors (KID), new designs have to be done, in part due to the impedance match needed between the KID chip and the whole 50 ohms readout circuit. Chips from two new hybrid designs, with an aluminum throughline coupled to titanium nitride microresonators, have been measured and compared to a TiN only chip. In the hybrid chips, parasitic temperature dependent box resonances are absent. The dark KID properties have been measured in a large set of resonators. A surprisingly long lifetime, up to 5.6 ms is observed in a few KIDs. For the other more reproducible devices, the mean electrical Noise Equivalent Power is 5.4 10-19 W.Hz1/2.

If driven sufficiently strongly, superconducting microresonators exhibit nonlinear behavior including response bifurcation. This behavior can arise from a variety of physical mechanisms including heating effects, grain boundaries or weak links, vortex penetration, or through the intrinsic nonlinearity of the kinetic inductance. Although microresonators used for photon detection are usually driven fairly hard in order to optimize their sensitivity, most experiments to date have not explored detector performance beyond the onset of bifurcation. Here we present measurements of a lumped-element superconducting microresonator designed for use as a far-infrared detector and operated deep into the nonlinear regime. The 1 GHz resonator was fabricated from a 22 nm thick titanium nitride film with a critical temperature of 2 K and a normal-state resistivity of $100\, \mu \Omega\,$cm. We measured the response of the device when illuminated with 6.4 pW optical loading using microwave readout powers that ranged from the low-power, linear regime to 18 dB beyond the onset of bifurcation. Over this entire range, the nonlinear behavior is well described by a nonlinear kinetic inductance. The best noise-equivalent power of $2 \times 10^{-16}$ W/Hz$^{1/2}$ at 10 Hz was measured at the highest readout power, and represents a $\sim$10 fold improvement compared with operating below the onset of bifurcation.

Lumped-element kinetic inductance detectors(LEKIDs) have recently shown considerable promise as direct absorption mm-wavelength detectors for astronomical applications. One major research thrust within the N\'eel Iram Kids Array (NIKA) collaboration has been to investigate the suitability of these detectors for deployment at the 30-meter IRAM telescope located on Pico Veleta in Spain. Compared to microwave kinetic inductance detectors (MKID), using quarter wavelength resonators, the resonant circuit of a LEKID consists of a discrete inductance and capacitance coupled to a feedline. A high and constant current density distribution in the inductive part of these resonators makes them very sensitive. Due to only one metal layer on a silicon substrate, the fabrication is relatively easy. In order to optimize the LEKIDs for this application, we have recently probed a wide variety of individual resonator and array parameters through simulation and physical testing. This included determining the optimal feed-line coupling, pixel geometry, resonator distribution within an array (in order to minimize pixel cross-talk), and resonator frequency spacing. Based on these results, a 144-pixel Aluminum array was fabricated and tested in a dilution fridge with optical access, yielding an average optical NEP of ~2E-16 W/Hz^1/2 (best pixels showed NEP = 6E-17 W/Hz^1/2 under 4-8 pW loading per pixel). In October 2010 the second prototype of LEKIDs has been tested at the IRAM 30 m telescope. A new LEKID geometry for 2 polarizations will be presented. Also first optical measurements of a titanium nitride array will be discussed.

SuperSpec is an ultra-compact spectrometer-on-a-chip for millimeter and submillimeter wavelength astronomy. Its very small size, wide spectral bandwidth, and highly multiplexed readout will enable construction of powerful multibeam spectrometers for high-redshift observations. The spectrometer consists of a horn-coupled microstrip feedline, a bank of narrow-band superconducting resonator filters that provide spectral selectivity, and Kinetic Inductance Detectors (KIDs) that detect the power admitted by each filter resonator. The design is realized using thin-film lithographic structures on a silicon wafer. The mm-wave microstrip feedline and spectral filters of the first prototype are designed to operate in the band from 195-310 GHz and are fabricated from niobium with at Tc of 9.2K. The KIDs are designed to operate at hundreds of MHz and are fabricated from titanium nitride with a Tc of 2K. Radiation incident on the horn travels along the mm-wave microstrip, passes through the frequency-selective filter, and is finally absorbed by the corresponding KID where it causes a measurable shift in the resonant frequency. In this proceedings, we present the design of the KIDs employed in SuperSpec and the results of initial laboratory testing of a prototype device. We will also briefly describe the ongoing development of a demonstration instrument that will consist of two 500-channel, R=700 spectrometers, one operating in the 1-mm atmospheric window and the other covering the 650 and 850 micron bands.

SuperSpec is a pathfinder for future lithographic spectrometer cameras, which promise to energize extra-galactic astrophysics at (sub)millimeter wavelengths: delivering 200--500 km/s spectral velocity resolution over an octave bandwidth for every pixel in a telescope's field of view. We present circuit simulations that prove the concept, which enables complete millimeter-band spectrometer devices in just a few square-millimeter footprint. We evaluate both single-stage and two-stage channelizing filter designs, which separate channels into an array of broad-band detectors, such as bolometers or kinetic inductance detector (KID) devices. We discuss to what degree losses (by radiation or by absorption in the dielectric) and fabrication tolerances affect the resolution or performance of such devices, and what steps we can take to mitigate the degradation. Such design studies help us formulate critical requirements on the materials and fabrication process, and help understand what practical limits currently exist to the capabilities these devices can deliver today or over the next few years.

We present the status of MUSIC, the MUltiwavelength Sub/millimeter Inductance Camera, a new instrument for the Caltech Submillimeter Observatory. MUSIC is designed to have a 14', diffraction-limited field-of-view instrumented with 2304 detectors in 576 spatial pixels and four spectral bands at 0.87, 1.04, 1.33, and 1.98 mm. MUSIC will be used to study dusty star-forming galaxies, galaxy clusters via the Sunyaev-Zeldovich effect, and star formation in our own and nearby galaxies. MUSIC uses broadband superconducting phased-array slot-dipole antennas to form beams, lumped-element on-chip bandpass filters to define spectral bands, and microwave kinetic inductance detectors to senseincoming light. The focal plane is fabricated in 8 tiles consisting of 72 spatial pixels each. It is coupled to the telescope via an ambient temperature ellipsoidal mirror and a cold reimaging lens. A cold Lyot stop sits at the image of the primary mirror formed by the ellipsoidal mirror. Dielectric and metal mesh filters are used to block thermal infrared and out-of-band radiation. The instrument uses a pulse tube cooler and 3He/3He/4He closed-cycle cooler to cool the focal plane to below 250 mK. A multilayer shield attenuates Earth's magnetic field. Each focal plane tile is read out by a single pair of coaxes and a HEMT amplifier. The readout system consists of 16 copies of custom-designed ADC/DAC and IF boards coupled to the CASPER ROACH platform. We focus on recent updates on the instrument design and results from the commissioning of the full camera in 2012.

Submillimeter cameras now have up to $10^4$ pixels (SCUBA 2). The proposed CCAT 25-meter submillimeter telescope will feature a 1 degree field-of-view. Populating the focal plane at 350 microns would require more than $10^6$ photon-noise limited pixels. To ultimately achieve this scaling, simple detectors and high-density multiplexing are essential. We are addressing this long-term challenge through the development of frequency-multiplexed superconducting microresonator detector arrays. These arrays use lumped-element, direct-absorption resonators patterned from titanium nitride films. We will discuss our progress toward constructing a scalable 350 micron pathfinder instrument focusing on fabrication simplicity, multiplexing density, and ultimately a low per-pixel cost.

We demonstrate single-photon counting at 1550 nm with titanium-nitride (TiN) microwave kinetic inductance detectors. Energy resolution of 0.4 eV and arrival-time resolution of 1.2 microseconds are achieved. 0-, 1-, 2-photon events are resolved and shown to follow Poisson statistics. We find that the temperature-dependent frequency shift deviates from the Mattis-Bardeen theory, and the dissipation response shows a shorter decay time than the frequency response at low temperatures. We suggest that the observed anomalous electrodynamics may be related to quasiparticle traps or subgap states in the disordered TiN films. Finally, the electron density-of-states is derived from the pulse response.

Large-scale arrays of Microwave Kinetic Inductance Detectors (MKIDs) are attractive candidates for use in imaging instruments for next generation submillimeter-wave telescopes such as CCAT. We have designed and fabricated tightly packed ~250-pixel MKID arrays using lumped-element resonators etched from a thin layer of superconducting TiNx deposited on a silicon substrate. The high pixel packing density in our initial design resulted in large microwave crosstalk due to electromagnetic coupling between the resonators. Our second design eliminates this problem by adding a grounding shield and using a double-wound geometry for the meander inductor to allow conductors with opposite polarity to be in close proximity. In addition, the resonator frequencies are distributed in a checkerboard pattern across the array. We present details for the two resonator and array designs and describe a circuit model for the full array that predicts the distribution of resonator frequencies and the crosstalk level. We also show results from a new experimental technique that conveniently measures crosstalk without the need for an optical setup. Our results reveal an improvement in crosstalk from 57% in the initial design down to \leq 2% in the second design. The general procedure and design guidelines in this work are applicable to future large arrays employing microwave resonators.

We demonstrate position and energy-resolved phonon-mediated detection of particle interactions in a silicon substrate instrumented with an array of microwave kinetic inductance detectors (MKIDs). The relative magnitude and delay of the signal received in each sensor allows the location of the interaction to be determined with < 1 mm precision at 30 keV. Using this position information, variations in the detector response with position can be removed, and an energy resolution of \sigma_E = 0.55 keV at 30 keV was measured. Since MKIDs can be fabricated from a single deposited film and are naturally multiplexed in the frequency domain, this technology can be extended to provide highly-pixelized athermal phonon sensors for ~1 kg scale detector elements. Such high-resolution, massive particle detectors would be applicable to next-generation rare-event searches such as the direct detection of dark matter, neutrinoless double-beta decay, or coherent neutrino-nucleus scattering.

BICEP2/Keck and SPIDER are cosmic microwave background (CMB) polarimeters targeting the B-mode polarization induced by primordial gravitational waves from inflation. They will be using planar arrays of polarization sensitive antenna-coupled TES bolometers, operating at frequencies between 90 GHz and 220 GHz. At 150 GHz each array consists of 64 polarimeters and four of these arrays are assembled together to make a focal plane, for a total of 256 dual-polarization elements (512 TES sensors). The detector arrays are integrated with a time-domain SQUID multiplexer developed at NIST and read out using the multi-channels electronics (MCE) developed at the University of British Columbia. Following our progress in improving detector parameters uniformity across the arrays and fabrication yield, our main effort has focused on improving detector arrays optical and noise performances, in order to produce science grade focal planes achieving target sensitivities. We report on changes in detector design implemented to optimize such performances and following focal plane arrays characterization. BICEP2 has deployed a first 150 GHz science grade focal plane to the South Pole in December 2009.

We report on an initial analysis of Herschel/HIFI observations of hydrogen chloride (HCl), hydrogen peroxide (H_2O_2), and molecular oxygen (O_2) in the Martian atmosphere performed on 13 and 16 April 2010 (L_s ~ 77{\deg}). We derived a constant volume mixing ratio of 1400 +/- 120 ppm for O_2 and determined upper limits of 200 ppt for HCl and 2 ppb for H_2O_2. Radiative transfer model calculations indicate that the vertical profile of O_2 may not be constant. Photochemical models determine the lowest values of H_2O_2 to be around L_s ~ 75{\deg} but overestimate the volume mixing ratio compared to our measurements.

We report on the detection with the HIFI instrument on board the Herschel satellite of the two hydrogen chloride isotopologues, H35Cl and H37Cl, towards the massive star-forming region W3A. The J=1-0 line of both species was observed with receiver 1b of the HIFI instrument at 625.9 and 624.9 GHz. The different hyperfine components were resolved. The observations were modeled with a non-local, non-LTE radiative transfer model that includes hyperfine line overlap and radiative pumping by dust. Both effects are found to play an important role in the emerging intensity from the different hyperfine components. The inferred H35Cl column density (a few times 1e14 cm^-2), and fractional abundance relative to H nuclei (~7.5e^-10), supports an upper limit to the gas phase chlorine depletion of ~200. Our best-fit model estimate of the H35Cl/H37Cl abundance ratio is ~2.1+/-0.5, slightly lower, but still compatible with the solar isotopic abundance ratio (~3.1). Since both species were observed simultaneously, this is the first accurate estimation of the [35Cl]/[37Cl] isotopic ratio in molecular clouds. Our models indicate that even for large line opacities and possible hyperfine intensity anomalies, the H35Cl and H37Cl J=1-0 integrated line-intensity ratio provides a good estimate of the 35Cl/37Cl isotopic abundance ratio.

We describe the design and performance of polarization selective antenna-coupled TES arrays that will be used in several upcoming Cosmic Microwave Background (CMB) experiments: SPIDER, BICEP-2/SPUD. The fully lithographic polarimeter arrays utilize planar phased-antennas for collimation (F/4 beam) and microstrip filters for band definition (25% bandwidth). These devices demonstrate high optical efficiency, excellent beam shapes, and well-defined spectral bands. The dual-polarization antennas provide well-matched beams and low cross polarization response, both important for high-fidelity polarization measurements. These devices have so far been developed for the 100 GHz and 150 GHz bands, two premier millimeter-wave atmospheric windows for CMB observations. In the near future, the flexible microstrip-coupled architecture can provide photon noise-limited detection for the entire frequency range of the CMBPOL mission. This paper is a summary of the progress we have made since the 2006 SPIE meeting in Orlando, FL.

We have developed a completely lithographic antenna-coupled bolometer for CMB polarimetry. The necessary components of a millimeter wave radiometer -- a beam forming element, a band defining filter, and the TES detectors -- are fabricated on a silicon chip with photolithography. The densely populated antennas allow a very efficient use of the focal plane area. We have fabricated and characterized a series of prototype devices. We find that their properties, including the frequency and angular responses, are in good agreement with the theoretical expectations. The devices are undergoing optimization for upcoming CMB experiments.