This paper demonstrates a cryogenic deformable mirror (DM) with 1,020 actuators based on micro-electrical mechanical systems (MEMS) technology. Cryogenic space-borne infrared telescopes can experience a wavefront error due to a figure error of their mirror surface, which makes the imaging performance worse. For on-orbit wavefront correction as one solution, we developed a MEMS-processed electro-static DM with a special surrounding structure for use under the cryogenic temperature. We conducted a laboratory demonstration of its operation in three cooling cycles between 5 K and 295 K. Using a laser interferometer, we detected the deformation corresponding to the applied voltages under the cryogenic temperature for the first time. The relationship between voltages and displacements was qualitatively expressed by the quadratic function, which is assumed based on the principle of electro-static DMs. We also found that it had a high operating repeatability of a few nm RMS and no significant hysteresis. Using the measured values of repeatability, we simulated the improvement of PSF by wavefront correction with our DM. These results show that our developed DM is effective in improving imaging performance and PSF contrast of space-borne infrared telescopes.

We present the SPICA Coronagraphic Instrument (SCI), which has been designed for a concentrated study of extra-solar planets (exoplanets). SPICA mission provides us with a unique opportunity to make high contrast observations because of its large telescope aperture, the simple pupil shape, and the capability for making infrared observations from space. The primary objectives for the SCI are the direct coronagraphic detection and spectroscopy of Jovian exoplanets in infrared, while the monitoring of transiting planets is another important target. The specification and an overview of the design of the instrument are shown. In the SCI, coronagraphic and non-coronagraphic modes are applicable for both an imaging and a spectroscopy. The core wavelength range and the goal contrast of the coronagraphic mode are 3.5--27$\mu$m, and 10$^{-6}$, respectively. Two complemental designs of binary shaped pupil mask coronagraph are presented. The SCI has capability of simultaneous observations of one target using two channels, a short channel with an InSb detector and a long wavelength channel with a Si:As detector. We also give a report on the current progress in the development of key technologies for the SCI.