Normalized to: Steinmetz, L.
[1]
oai:arXiv.org:1801.06991 [pdf] - 1678531
Commercialization of micro-fabrication of antenna-coupled Transition
Edge Sensor bolometer detectors for studies of the Cosmic Microwave
Background
Submitted: 2018-01-22
We report on the development of commercially fabricated multi-chroic antenna
coupled Transition Edge Sensor (TES) bolometer arrays for Cosmic Microwave
Background (CMB) polarimetry experiments. CMB polarimetry experiments have
deployed instruments in stages. Stage-II experiments deployed with O(1,000)
detectors and reported successful detection of B-mode (divergent free)
polarization pattern in the CMB. Stage-III experiments have recently started
observing with O(10,000) detectors with wider frequency coverage. A concept for
a Stage-IV experiment, CMB-S4, is emerging to make a definitive measurement of
CMB polarization from the ground with O(400,000) detectors. The orders of
magnitude increase in detector count for CMB-S4 requires a new approach in
detector fabrication to increase fabrication throughput.and reduce cost. We
report on collaborative efforts with two commercial micro-fabrication foundries
to fabricate antenna coupled TES bolometer detectors. The detector design is
based on the sinuous antenna coupled dichroic detector from the POLARBEAR-2
experiment. The TES bolometers showed the expected I-V response and the RF
performance agrees with simulation. We will discuss the motivation, design
consideration, fabrication processes, test results, and how industrial detector
fabrication could be a path to fabricate hundreds of detector wafers for future
CMB polarimetry experiments.