Micro-electro-mechanical systems (MEMS) technology can provide for deformable mirrors (DMs) with excellent performance within a favorable economy of scale. Large MEMS-based astronomical adaptive optics (AO) systems such as the Gemini Planet Imager are coming on-line soon. As MEMS DM end-users, we discuss our decade of practice with the micromirrors, from inspecting and characterizing devices to evaluating their performance in the lab. We also show MEMS wavefront correction on-sky with the "Villages" AO system on a 1-m telescope, including open-loop control and visible-light imaging. Our work demonstrates the maturity of MEMS technology for astronomical adaptive optics.

At the University of California's Lick Observatory, we have implemented an on-sky testbed for next-generation adaptive optics (AO) technologies. The Visible-Light Laser Guidestar Experiments instrument (ViLLaGEs) includes visible-light AO, a micro-electro-mechanical-systems (MEMS) deformable mirror, and open-loop control of said MEMS on the 1-meter Nickel telescope at Mt. Hamilton. In this paper we evaluate the performance of ViLLaGEs in open- and closed-loop control, finding that both control methods give equivalent Strehl ratios of up to ~ 7% in I-band and similar rejection of temporal power. Therefore, we find that open-loop control of MEMS on-sky is as effective as closed-loop control. Furthermore, after operating the system for three years, we find MEMS technology to function well in the observatory environment. We construct an error budget for the system, accounting for 130 nm of wavefront error out of 190 nm error in the science-camera PSFs. We find that the dominant known term is internal static error, and that the known contributions to the error budget from open-loop control (MEMS model, position repeatability, hysteresis, and WFS linearity) are negligible.