We propose an all-silicon multi-layer interference filter composed solely of silicon with sub-wavelength structure (SWS) in order to realize high performance optical filters operating in the THz frequency region with robustness against cryogenic thermal cycling and mechanical damage. We demonstrate fabrication of a three-layer prototype using well-established common micro-electro-mechanical systems (MEMS) technologies as a first step toward developing practical filters. The measured transmittance of the three-layer filter agrees well with the theoretical transmittances calculated by a simple thin-film calculation with effective refractive indices as well as a rigorous coupled-wave analysis simulation. We experimentally show that SWS layers can work as homogeneous thin-film interference layers with effective refractive indices even if there are multiple SWS layers in a filter.

We present the SPICA Coronagraphic Instrument (SCI), which has been designed for a concentrated study of extra-solar planets (exoplanets). SPICA mission provides us with a unique opportunity to make high contrast observations because of its large telescope aperture, the simple pupil shape, and the capability for making infrared observations from space. The primary objectives for the SCI are the direct coronagraphic detection and spectroscopy of Jovian exoplanets in infrared, while the monitoring of transiting planets is another important target. The specification and an overview of the design of the instrument are shown. In the SCI, coronagraphic and non-coronagraphic modes are applicable for both an imaging and a spectroscopy. The core wavelength range and the goal contrast of the coronagraphic mode are 3.5--27$\mu$m, and 10$^{-6}$, respectively. Two complemental designs of binary shaped pupil mask coronagraph are presented. The SCI has capability of simultaneous observations of one target using two channels, a short channel with an InSb detector and a long wavelength channel with a Si:As detector. We also give a report on the current progress in the development of key technologies for the SCI.