McCarville, T.
Normalized to: McCarville, T.
1 article(s) in total. 6 co-authors. Median position in authors list is 2,0.
[1]
oai:arXiv.org:1402.1743 [pdf] - 1203242
Sub-nanometer flattening of a 45-cm long, 45-actuator x-ray deformable
mirror
Submitted: 2014-02-07, last modified: 2014-04-24
We have built a 45-cm long x-ray deformable mirror of super-polished
single-crystal silicon that has 45 actuators along the tangential axis. After
assembly the surface height error was 19 nm rms. With use of high-precision
visible-light metrology and precise control algorithms, we have actuated the
x-ray deformable mirror and flattened its entire surface to 0.7 nm rms
controllable figure error. This is, to our knowledge, the first sub-nanometer
active flattening of a substrate longer than 15 cm.