McAndrew, Brendan
Normalized to: McAndrew, B.
1 article(s) in total. 5 co-authors. Median position in authors list is 4,0.
[1]
oai:arXiv.org:1209.2987 [pdf] - 571787
Infrared dielectric properties of low-stress silicon nitride
Submitted: 2012-09-13
Silicon nitride thin films play an important role in the realization of
sensors, filters, and high-performance circuits. Estimates of the dielectric
function in the far- and mid-infrared regime are derived from the observed
transmittance spectra for a commonly employed low-stress silicon nitride
formulation. The experimental, modeling, and numerical methods used to extract
the dielectric parameters with an accuracy of approximately 4% are presented.