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McAndrew, Brendan

Normalized to: McAndrew, B.

1 article(s) in total. 5 co-authors. Median position in authors list is 4,0.

[1]  oai:arXiv.org:1209.2987  [pdf] - 571787
Infrared dielectric properties of low-stress silicon nitride
Comments:
Submitted: 2012-09-13
Silicon nitride thin films play an important role in the realization of sensors, filters, and high-performance circuits. Estimates of the dielectric function in the far- and mid-infrared regime are derived from the observed transmittance spectra for a commonly employed low-stress silicon nitride formulation. The experimental, modeling, and numerical methods used to extract the dielectric parameters with an accuracy of approximately 4% are presented.