We report the design, fabrication and testing of Lumped Element Kinetic Inductance Detectors (LEKID) showing performance in line with the requirements of the next generation space telescopes operating in the spectral range from 80 to 600 GHz. This range is of particular interest for Cosmic Microwave Background (CMB) studies. For this purpose we have designed and fabricated 100-pixel arrays covering five distinct bands. These wafers have been measured via multiplexing, where a full array is read out using a single pair of lines. We adopted a custom cold black-body installed in front of the detectors and regulated at temperatures between 1 K and 20 K. We will describe in the present paper the main design considerations, the fabrication processes, the testing and the data analysis.

We have fabricated planar amorphous Indium Oxide superconducting resonators ($T_c\sim2.8$ K) that are sensitive to frequency-selective radiation in the range of 7 to 10 GHz. Those values lay far below twice the superconducting gap that worths about 200 GHz. The photons detection consists in a shift of the fundamental resonance frequency. We show that the detected frequency can be adjusted by modulating the total length of the superconducting resonator. We attribute those observations to the excitation of higher-order resonance modes. The coupling between the fundamental lumped and the higher order distributed resonance is due to the kinetic inductance non-linearity with current. These devices, that we have called Sub-gap Kinetic Inductance Detectors (SKIDs), are to be distinguished from the standard Kinetic Inductance Detectors (KIDs) in which quasi-particles are generated when incident light breaks down Cooper pairs.

The New IRAM KID Arrays 2 (NIKA2) consortium has just finished installing and commissioning a millimetre camera on the IRAM 30 m telescope. It is a dual-band camera operating with three frequency multiplexed kilo-pixels arrays of Lumped Element Kinetic Inductance Detectors (LEKID) cooled at 150 mK, designed to observe the intensity and polarisation of the sky at 260 and 150 GHz (1.15 and 2 mm). NIKA2 is today an IRAM resident instrument for millimetre astronomy, such as Intra Cluster Medium from intermediate to distant clusters and so for the follow-up of Planck satellite detected clusters, high redshift sources and quasars, early stages of star formation and nearby galaxies emission. We present an overview of the instrument performance as it has been evaluated at the end of the commissioning phase.

We have developed Lumped Element Kinetic Inductance Detectors (LEKID) sensitive in the frequency band from 80 to 120~GHz. In this work, we take advantage of the so-called proximity effect to reduce the superconducting gap of Aluminium, otherwise strongly suppressing the LEKID response for frequencies smaller than 100~GHz. We have designed, produced and optically tested various fully multiplexed arrays based on multi-layers combinations of Aluminium (Al) and Titanium (Ti). Their sensitivities have been measured using a dedicated closed-circle 100 mK dilution cryostat and a sky simulator allowing to reproduce realistic observation conditions. The spectral response has been characterised with a Martin-Puplett interferometer up to THz frequencies, and with a resolution of 3~GHz. We demonstrate that Ti-Al LEKID can reach an optical sensitivity of about $1.4$ $10^{-17}$~$W/Hz^{0.5}$ (best pixel), or $2.2$ $10^{-17}$~$W/Hz^{0.5}$ when averaged over the whole array. The optical background was set to roughly 0.4~pW per pixel, typical for future space observatories in this particular band. The performance is close to a sensitivity of twice the CMB photon noise limit at 100~GHz which drove the design of the Planck HFI instrument. This figure remains the baseline for the next generation of millimetre-wave space satellites.