Direct imaging of exoplanet systems requires the use of coronagraphs to reach high contrast levels (10^-8 to 10^-11) at small angular separations (0.1"). However, the performance of these devices is drastically limited by aberrations (in phase or in amplitude, introduced either by atmosphere or by the optics). Coronagraphs must therefore be combined with extreme adaptive optic systems, composed of a focal plane wavefront sensor and of a high order deformable mirror. These adaptive optic systems must reach a residual error in the corrected wavefront of less than 0.1 nm (RMS) with a rate of 1 kHz. In addition, the surface defects of the deformable mirror, inherent from the fabrication process, must be limited in order to avoid the introduction of amplitude aberrations. An experimental high contrast bench has been developed at the Paris Observatory (LESIA). This bench includes a Boston Micromachine deformable mirror composed of 1024 actuators. For a precise analysis of its surface and performance, we characterized this mirror on the interferometric bench developed since 2004 at the Marseille Observatory (LAM). In this paper, we present this interferometric bench as well as the results of the analysis. This will include a precise surface characterization and a description of the behavior of the actuators, on a 10 by 10 actuator range (behavior of a single actuator, study of the cross-talk between neighbor actuators, influence of a stuck actuator) and on full mirror scale (general surface shape).

MOEMS Deformable Mirrors (DM) are key components for next generation instruments with innovative adaptive optics systems, in existing telescopes and in the future ELTs. These DMs must perform at room temperature as well as in cryogenic and vacuum environment. Ideally, the MOEMS-DMs must be designed to operate in such environment. We present some major rules for designing / operating DMs in cryo and vacuum. We chose to use interferometry for the full characterization of these devices, including surface quality measurement in static and dynamical modes, at ambient and in vacuum/cryo. Thanks to our previous set-up developments, we placed a compact cryo-vacuum chamber designed for reaching 10-6 mbar and 160K, in front of our custom Michelson interferometer, able to measure performances of the DM at actuator/segment level as well as whole mirror level, with a lateral resolution of 2{\mu}m and a sub-nanometric z-resolution. Using this interferometric bench, we tested the Iris AO PTT111 DM: this unique and robust design uses an array of single crystalline silicon hexagonal mirrors with a pitch of 606{\mu}m, able to move in tip, tilt and piston with strokes from 5 to 7{\mu}m, and tilt angle in the range of +/-5mrad. They exhibit typically an open-loop flat surface figure as good as <20nm rms. A specific mount including electronic and opto-mechanical interfaces has been designed for fitting in the test chamber. Segment deformation, mirror shaping, open-loop operation are tested at room and cryo temperature and results are compared. The device could be operated successfully at 160K. An additional, mainly focus-like, 500 nm deformation is measured at 160K; we were able to recover the best flat in cryo by correcting the focus and local tip-tilts on some segments. Tests on DM with different mirror thicknesses (25{\mu}m and 50{\mu}m) and different coatings (silver and gold) are currently under way.