MOEMS Deformable Mirrors (DM) are key components for next generation instruments with innovative adaptive optics systems, in existing telescopes and in the future ELTs. These DMs must perform at room temperature as well as in cryogenic and vacuum environment. Ideally, the MOEMS-DMs must be designed to operate in such environment. We present some major rules for designing / operating DMs in cryo and vacuum. We chose to use interferometry for the full characterization of these devices, including surface quality measurement in static and dynamical modes, at ambient and in vacuum/cryo. Thanks to our previous set-up developments, we placed a compact cryo-vacuum chamber designed for reaching 10-6 mbar and 160K, in front of our custom Michelson interferometer, able to measure performances of the DM at actuator/segment level as well as whole mirror level, with a lateral resolution of 2{\mu}m and a sub-nanometric z-resolution. Using this interferometric bench, we tested the Iris AO PTT111 DM: this unique and robust design uses an array of single crystalline silicon hexagonal mirrors with a pitch of 606{\mu}m, able to move in tip, tilt and piston with strokes from 5 to 7{\mu}m, and tilt angle in the range of +/-5mrad. They exhibit typically an open-loop flat surface figure as good as <20nm rms. A specific mount including electronic and opto-mechanical interfaces has been designed for fitting in the test chamber. Segment deformation, mirror shaping, open-loop operation are tested at room and cryo temperature and results are compared. The device could be operated successfully at 160K. An additional, mainly focus-like, 500 nm deformation is measured at 160K; we were able to recover the best flat in cryo by correcting the focus and local tip-tilts on some segments. Tests on DM with different mirror thicknesses (25{\mu}m and 50{\mu}m) and different coatings (silver and gold) are currently under way.

Long-term stability of deformable mirrors (DM) is a critical performance requirement for instruments requiring open-loop corrections. The effects of temperature changes in the DM performance are equally critical for such instruments. This paper investigates the long-term stability of three different Iris AO PTT111 DMs that were calibrated at different times ranging from 13 months to nearly 29 months prior to subsequent testing. Performance testing showed that only a small increase in positioning errors occurred from the initial calibration date to the test dates. The increases in errors ranged from as little as 1.38 nm rms after 18 months to 5.68 nm rms after 29 months. The paper also studies the effects of small temperature changes, up to 6.2{\deg}C around room temperature. For three different arrays, the errors ranged from 0.62-1.42 nm rms/{\deg}C. Removing the effects of packaging shows that errors are $\le$0.50 nm rms/{\deg}C. Finally, measured data showed that individual segments deformed $\le$0.11 nm rms/{\deg}C when heated.