The energy resolution of a single photon counting Microwave Kinetic Inductance Detector (MKID) can be degraded by noise coming from the primary low temperature amplifier in the detector's readout system. Until recently, quantum limited amplifiers have been incompatible with these detectors due to dynamic range, power, and bandwidth constraints. However, we show that a kinetic inductance based traveling wave parametric amplifier can be used for this application and reaches the quantum limit. The total system noise for this readout scheme was equal to ~2.1 in units of quanta. For incident photons in the 800 to 1300 nm range, the amplifier increased the average resolving power of the detector from ~6.7 to 9.3 at which point the resolution becomes limited by noise on the pulse height of the signal. Noise measurements suggest that a resolving power of up to 25 is possible if redesigned detectors can remove this additional noise source.

If driven sufficiently strongly, superconducting microresonators exhibit nonlinear behavior including response bifurcation. This behavior can arise from a variety of physical mechanisms including heating effects, grain boundaries or weak links, vortex penetration, or through the intrinsic nonlinearity of the kinetic inductance. Although microresonators used for photon detection are usually driven fairly hard in order to optimize their sensitivity, most experiments to date have not explored detector performance beyond the onset of bifurcation. Here we present measurements of a lumped-element superconducting microresonator designed for use as a far-infrared detector and operated deep into the nonlinear regime. The 1 GHz resonator was fabricated from a 22 nm thick titanium nitride film with a critical temperature of 2 K and a normal-state resistivity of $100\, \mu \Omega\,$cm. We measured the response of the device when illuminated with 6.4 pW optical loading using microwave readout powers that ranged from the low-power, linear regime to 18 dB beyond the onset of bifurcation. Over this entire range, the nonlinear behavior is well described by a nonlinear kinetic inductance. The best noise-equivalent power of $2 \times 10^{-16}$ W/Hz$^{1/2}$ at 10 Hz was measured at the highest readout power, and represents a $\sim$10 fold improvement compared with operating below the onset of bifurcation.

Submillimeter cameras now have up to $10^4$ pixels (SCUBA 2). The proposed CCAT 25-meter submillimeter telescope will feature a 1 degree field-of-view. Populating the focal plane at 350 microns would require more than $10^6$ photon-noise limited pixels. To ultimately achieve this scaling, simple detectors and high-density multiplexing are essential. We are addressing this long-term challenge through the development of frequency-multiplexed superconducting microresonator detector arrays. These arrays use lumped-element, direct-absorption resonators patterned from titanium nitride films. We will discuss our progress toward constructing a scalable 350 micron pathfinder instrument focusing on fabrication simplicity, multiplexing density, and ultimately a low per-pixel cost.

Large-scale arrays of Microwave Kinetic Inductance Detectors (MKIDs) are attractive candidates for use in imaging instruments for next generation submillimeter-wave telescopes such as CCAT. We have designed and fabricated tightly packed ~250-pixel MKID arrays using lumped-element resonators etched from a thin layer of superconducting TiNx deposited on a silicon substrate. The high pixel packing density in our initial design resulted in large microwave crosstalk due to electromagnetic coupling between the resonators. Our second design eliminates this problem by adding a grounding shield and using a double-wound geometry for the meander inductor to allow conductors with opposite polarity to be in close proximity. In addition, the resonator frequencies are distributed in a checkerboard pattern across the array. We present details for the two resonator and array designs and describe a circuit model for the full array that predicts the distribution of resonator frequencies and the crosstalk level. We also show results from a new experimental technique that conveniently measures crosstalk without the need for an optical setup. Our results reveal an improvement in crosstalk from 57% in the initial design down to \leq 2% in the second design. The general procedure and design guidelines in this work are applicable to future large arrays employing microwave resonators.