The Cosmology Large Angular Scale Surveyor (CLASS) is a telescope array that observes the cosmic microwave background (CMB) over 75% of the sky from the Atacama Desert, Chile, at frequency bands centered near 40, 90, 150, and 220 GHz. CLASS measures the large angular scale ($1^\circ\lesssim\theta\leqslant 90^\circ$) CMB polarization to constrain the tensor-to-scalar ratio at the $r\sim0.01$ level and the optical depth to last scattering to the sample variance limit. This paper presents the optical characterization of the 40 GHz telescope during its first observation era, from 2016 September to 2018 February. High signal-to-noise observations of the Moon establish the pointing and beam calibration. The telescope boresight pointing variation is $<0.023^\circ$ ($<1.6$% of the beam's full width at half maximum (FWHM)). We estimate beam parameters per detector and in aggregate, as in the CMB survey maps. The aggregate beam has an FWHM of $1.579^\circ\pm.001^\circ$ and a solid angle of $838 \pm 6\ \mu{\rm sr}$, consistent with physical optics simulations. The corresponding beam window function has a sub-percent error per multipole at $\ell < 200$. An extended $90^\circ$ beam map reveals no significant far sidelobes. The observed Moon polarization shows that the instrument polarization angles are consistent with the optical model and that the temperature-to-polarization leakage fraction is $<10^{-4}$ (95% C.L.). We find that the Moon-based results are consistent with measurements of M42, RCW 38, and Tau A from CLASS's CMB survey data. In particular, Tau A measurements establish degree-level precision for instrument polarization angles.

We report on the development of a polarization-sensitive dichroic (150/220 GHz) detector array for the Cosmology Large Angular Scale Surveyor (CLASS) delivered to the telescope site in June 2019. In concert with existing 40 and 90 GHz telescopes, the 150/220 GHz telescope will make observations of the cosmic microwave background over large angular scales aimed at measuring the primordial B-mode signal, the optical depth to reionization, and other fundamental physics and cosmology. The 150/220 GHz focal plane array consists of three detector modules with 1020 transition edge sensor (TES) bolometers in total. Each dual-polarization pixel on the focal plane contains four bolometers to measure the two linear polarization states at 150 and 220 GHz. Light is coupled through a planar orthomode transducer (OMT) fed by a smooth-walled feedhorn array made from an aluminum-silicon alloy (CE7). In this work, we discuss the design, assembly, and in-lab characterization of the 150/220 GHz detector array. The detectors are photon-noise limited, and we estimate the total array noise-equivalent power (NEP) to be 2.5 and 4 aW$\sqrt{\mathrm{s}}$ for 150 and 220 GHz arrays, respectively.

The Origins Space Telescope (Origins) traces our cosmic history, from the formation of the first galaxies and the rise of metals to the development of habitable worlds and present-day life. Origins does this through exquisite sensitivity to infrared radiation from ions, atoms, molecules, dust, water vapor and ice, and observations of extra-solar planetary atmospheres, protoplanetary disks, and large-area extragalactic fields. Origins operates in the wavelength range 2.8 to 588 microns and is 1000 times more sensitive than its predecessors due to its large, cold (4.5 K) telescope and advanced instruments. Origins was one of four large missions studied by the community with support from NASA and industry in preparation for the 2020 Decadal Survey in Astrophysics. This is the final study report.

We report circular polarization measurements from the first two years of observation with the 40 GHz polarimeter of the Cosmology Large Angular Scale Surveyor (CLASS). CLASS is conducting a multi-frequency survey covering 75% of the sky from the Atacama Desert designed to measure the cosmic microwave background (CMB) linear E and B polarization on angular scales $1^\circ \lesssim \theta \leq 90^\circ$, corresponding to a multipole range of $2 \leq \ell \lesssim 200$. The modulation technology enabling measurements of linear polarization at the largest angular scales from the ground, the Variable-delay Polarization Modulator, is uniquely designed to provide explicit sensitivity to circular polarization (Stokes $V$). We present a first detection of circularly polarized atmospheric emission at 40 GHz that is well described by a dipole with an amplitude of $124\pm4\,\mathrm{\mu K}$ when observed at an elevation of $45^\circ$, and discuss its potential impact as a foreground to CMB experiments. Filtering the atmospheric component, CLASS places a 95% C.L. upper limit of $0.4\,\mathrm{\mu K}^2$ to $13.5\,\mathrm{\mu K}^2$ on $\ell(\ell+1)C_\ell^{VV}/(2\pi)$ between $1 \leq \ell \leq 120$, representing a two-orders-of-magnitude improvement over previous limits.

The Cosmology Large Angular Scale Surveyor (CLASS) is mapping the polarization of the Cosmic Microwave Background (CMB) at large angular scales ($2<\ell\lesssim200$) in search of a primordial gravitational wave B-mode signal down to a tensor-to-scalar ratio of $r \approx 0.01$. The same data set will provide a near sample-variance-limited measurement of the optical depth to reionization. Between June 2016 and March 2018, CLASS completed the largest ground-based Q-band CMB survey to date, covering over 31 000~square-degrees (75% of the sky), with an instantaneous array noise-equivalent temperature (NET) sensitivity of $32~\mu \mbox{K}_{cmb}\sqrt{\mbox{s}}$. We demonstrate that the detector optical loading ($1.6~\mbox{pW}$) and noise-equivalent power ($19~\mbox{aW}\sqrt{\mbox{s}}$) match the expected noise model dominated by photon bunching noise. We derive a $13.1\pm0.3~\mbox{K/pW}$ calibration to antenna temperature based on Moon observations, which translates to an optical efficiency of $0.48\pm0.04$ and a $27~\mbox{K}$ system noise temperature. Finally, we report a Tau A flux density of $308\pm11~\mbox{Jy}$ at $38.4\pm0.2~\mbox{GHz}$, consistent with the WMAP Tau A time-dependent spectral flux density model.

A photon noise limited sub-mm/far-IR cold telescope in space will require detectors with noise equivalent power (NEP) less than 1x10-19 W/Hz1/2 for imaging applications and at least an order of magnitude lower for spectroscopic studies. The detector NEP can be reduced by lowering the operation temperature and improving the thermal isolation between the bolometer and a heat bath. We report on the fabrication of membrane isolated transition edge sensor bolometers incorporating compact (<50 {\mu}m) thermal isolation beams based on phononic filters. Phononic filters are created by etching quasi-periodic nanoscale structures into supporting thermo-mechanical beams. The cross-sectional dimensions of the etched features are less than the thermal wavelength at the operating temperature, enabling coherent phonon transport to take place in one dimension. The phonon stop-band can be tuned by adjusting the scale of the quasi-periodic structures. Cascading multiple filter stages can increase bandwidth and provide improved thermal isolation similar to the function of a multi-stage electrical filter. We describe the fabrication of AlMn based transition edge sensor bolometers on silicon and silicon nitride membranes isolated by one- and two-dimensional phononic filters. The phononic filters are patterned through electron beam lithography and isolated with deep reactive ion etching.

The Cosmology Large Angular Scale Surveyor consists of four instruments performing a CMB polarization survey. Currently, the 40 GHz and first 90 GHz instruments are deployed and observing, with the second 90 GHz and a multichroic 150/220 GHz instrument to follow. The receiver is a central component of each instrument's design and functionality. This paper describes the CLASS receiver design, using the first 90 GHz receiver as a primary reference. Cryogenic cooling and filters maintain a cold, low-noise environment for the detectors. We have achieved receiver detector temperatures below 50 mK in the 40 GHz instrument for 85% of the initial 1.5 years of operation, and observed in-band efficiency that is consistent with pre-deployment estimates. At 90 GHz, less than 26% of in-band power is lost to the filters and lenses in the receiver, allowing for high optical efficiency. We discuss the mounting scheme for the filters and lenses, the alignment of the cold optics and detectors, stray light control, and magnetic shielding.

The Cosmology Large Angular Scale Surveyor (CLASS) aims to detect and characterize the primordial B-mode signal and make a sample-variance-limited measurement of the optical depth to reionization. CLASS is a ground-based, multi-frequency microwave polarimeter that surveys 70% of the microwave sky every day from the Atacama Desert. The focal plane detector arrays of all CLASS telescopes contain smooth-walled feedhorns that couple to transition-edge sensor (TES) bolometers through symmetric planar orthomode transducer (OMT) antennas. These low noise polarization-sensitive detector arrays are fabricated on mono-crystalline silicon wafers to maintain TES uniformity and optimize optical efficiency throughout the wafer. In this paper, we discuss the design and characterization of the first CLASS 93 GHz detector array. We measure the dark parameters, bandpass, and noise spectra of the detectors and report that the detectors are photon-noise limited. With current array yield of 82%, we estimate the total array noise-equivalent power (NEP) to be 2.1 aW$\sqrt[]{\mathrm{s}}$.

The search for inflationary primordial gravitational waves and the measurement of the optical depth to reionization, both through their imprint on the large angular scale correlations in the polarization of the cosmic microwave background (CMB), has created the need for high sensitivity measurements of polarization across large fractions of the sky at millimeter wavelengths. These measurements are subject to instrumental and atmospheric $1/f$ noise, which has motivated the development of polarization modulators to facilitate the rejection of these large systematic effects. Variable-delay polarization modulators (VPMs) are used in the Cosmology Large Angular Scale Surveyor (CLASS) telescopes as the first element in the optical chain to rapidly modulate the incoming polarization. VPMs consist of a linearly polarizing wire grid in front of a movable flat mirror. Varying the distance between the grid and the mirror produces a changing phase shift between polarization states parallel and perpendicular to the grid which modulates Stokes U (linear polarization at $45^\circ$) and Stokes V (circular polarization). The CLASS telescopes have VPMs as the first optical element from the sky; this simultaneously allows a lock-in style polarization measurement and the separation of sky polarization from any instrumental polarization further along in the optical path. The Q-band CLASS VPM was the first VPM to begin observing the CMB full time, starting in the Spring of 2016. The first W-band CLASS VPM was installed in the Spring of 2018.

We present here a study of the use of the SiAl alloy CE7 for the packaging of silicon devices at cryogenic temperatures. We report on the development of baseplates and feedhorn arrays for millimeter wave bolometric detectors for astrophysics. Existing interfaces to such detectors are typically made either of metals, which are easy to machine but mismatched to the thermal contraction profile of Si devices, or of silicon, which avoids the mismatch but is difficult to directly machine. CE7 exhibits properties of both Si and Al, which makes it uniquely well suited for this application. We measure CE7 to a) superconduct below a critical transition temperature, $T_c$, $\sim$ 1.2 K b) have a thermal contraction profile much closer to Si than metals, which enables simple mating, and c) have a low thermal conductivity which can be improved by Au-plating. Our investigations also demonstrate that CE7 can be machined well enough to fabricate small structures, such as \#0-80 threaded holes, to tight tolerances ($\sim$ 25 $\mu$m) in contrast with pure silicon and similar substrates. We have fabricated CE7 baseplates being deployed in the 93 GHz polarimeteric focal planes used in the Cosmology Large Angular Scale Surveyor (CLASS). We also report on the development of smooth-walled feedhorn arrays made of CE7 that will be used in a focal plane of dichroic 150/220 GHz detectors for the CLASS High-Frequency Camera.

The Primordial Inflation Explorer (PIXIE) is an Explorer-class mission concept designed to measure the polarization and absolute intensity of the cosmic microwave background. In the following, we report on the design, fabrication, and performance of the multimode polarization-sensitive bolometers for PIXIE, which are based on silicon thermistors. In particular we focus on several recent advances in the detector design, including the implementation of a scheme to greatly raise the frequencies of the internal vibrational modes of the large-area, low-mass optical absorber structure consisting of a grid of micromachined, ion-implanted silicon wires. With $\sim30$ times the absorbing area of the spider-web bolometers used by Planck, the tensioning scheme enables the PIXIE bolometers to be robust in the vibrational and acoustic environment at launch of the space mission. More generally, it could be used to reduce microphonic sensitivity in other types of low temperature detectors. We also report on the performance of the PIXIE bolometers in a dark cryogenic environment.

The design and fabrication of low-loss wide-bandwidth superconducting vacuum-gap crossovers for high performance millimeter wave applications are described. In order to reduce ohmic and parasitic losses at millimeter wavelengths a vacuum gap is preferred relative to dielectric spacer. Here, vacuum-gap crossovers were realized by using a sacrificial polymer layer followed by niobium sputter deposition optimized for coating coverage over an underlying niobium signal layer. Both coplanar waveguide and microstrip crossover topologies have been explored in detail. The resulting fabrication process is compatible with a bulk micro-machining process for realizing waveguide coupled detectors, which includes sacrificial wax bonding, and wafer backside deep reactive ion etching for creation of leg isolated silicon membrane structures. Release of the vacuum gap structures along with the wax bonded wafer after DRIE is implemented in the same process step used to complete the detector fabrication

We describe feedhorn-coupled polarization-sensitive detector arrays that utilize monocrystalline silicon as the dielectric substrate material. Monocrystalline silicon has a low-loss tangent and repeatable dielectric constant, characteristics that are critical for realizing efficient and uniform superconducting microwave circuits. An additional advantage of this material is its low specific heat. In a detector pixel, two Transition-Edge Sensor (TES) bolometers are antenna-coupled to in-band radiation via a symmetric planar orthomode transducer (OMT). Each orthogonal linear polarization is coupled to a separate superconducting microstrip transmission line circuit. On-chip filtering is employed to both reject out-of-band radiation from the upper band edge to the gap frequency of the niobium superconductor, and to flexibly define the bandwidth for each TES to meet the requirements of the application. The microwave circuit is compatible with multi-chroic operation. Metalized silicon platelets are used to define the backshort for the waveguide probes. This micro-machined structure is also used to mitigate the coupling of out-of-band radiation to the microwave circuit. At 40 GHz, the detectors have a measured efficiency of 90%. In this paper, we describe the development of the 90 GHz detector arrays that will be demonstrated using the Cosmology Large Angular Scale Surveyor (CLASS) ground-based telescope.

The Cosmology Large Angular Scale Surveyor (CLASS) is a four telescope array designed to characterize relic primordial gravitational waves from inflation and the optical depth to reionization through a measurement of the polarized cosmic microwave background (CMB) on the largest angular scales. The frequencies of the four CLASS telescopes, one at 38 GHz, two at 93 GHz, and one dichroic system at 145/217 GHz, are chosen to avoid spectral regions of high atmospheric emission and span the minimum of the polarized Galactic foregrounds: synchrotron emission at lower frequencies and dust emission at higher frequencies. Low-noise transition edge sensor detectors and a rapid front-end polarization modulator provide a unique combination of high sensitivity, stability, and control of systematics. The CLASS site, at 5200 m in the Chilean Atacama desert, allows for daily mapping of up to 70\% of the sky and enables the characterization of CMB polarization at the largest angular scales. Using this combination of a broad frequency range, large sky coverage, control over systematics, and high sensitivity, CLASS will observe the reionization and recombination peaks of the CMB E- and B-mode power spectra. CLASS will make a cosmic variance limited measurement of the optical depth to reionization and will measure or place upper limits on the tensor-to-scalar ratio, $r$, down to a level of 0.01 (95\% C.L.).

Characterization of the minute cosmic microwave background polarization signature requires multi-frequency, high-throughput precision instrument systems. We have previously described the detector fabrication of a 40 GHz focal plane and now describe the fabrication of detector modules for measurement of the CMB at 90 GHz. The 90 GHz detectors are a scaled version of the 40 GHz architecture where, due to smaller size detectors, we have implemented a modular (wafer level) rather than the chip-level architecture. The new fabrication process utilizes the same design rules with the added challenge of increased wiring density to the 74 TES's as well as a new wafer level hybridization procedure. The hexagonally shaped modules are tile-able, and as such, can be used to form the large focal planes required for a space-based CMB polarimeter. The detectors described here will be deployed in two focal planes with 7 modules each in the Johns Hopkins University led ground-based Cosmology Large Angular Scale Surveyor (CLASS) telescope.

The Cosmology Large Angular Scale Surveyor (CLASS) will measure the polarization of the Cosmic Microwave Background to search for and characterize the polarized signature of inflation. CLASS will operate from the Atacama Desert and observe $\sim$70% of the sky. A variable-delay polarization modulator (VPM) modulates the polarization at $\sim$10 Hz to suppress the 1/f noise of the atmosphere and enable the measurement of the large angular scale polarization modes. The measurement of the inflationary signal across angular scales that span both the recombination and reionization features allows a test of the predicted shape of the polarized angular power spectra in addition to a measurement of the energy scale of inflation. CLASS is an array of telescopes covering frequencies of 38, 93, 148, and 217 GHz. These frequencies straddle the foreground minimum and thus allow the extraction of foregrounds from the primordial signal. Each focal plane contains feedhorn-coupled transition-edge sensors that simultaneously detect two orthogonal linear polarizations. The use of single-crystal silicon as the dielectric for the on-chip transmission lines enables both high efficiency and uniformity in fabrication. Integrated band definition has been implemented that both controls the bandpass of the single mode transmission on the chip and prevents stray light from coupling to the detectors.

The Cosmology Large Angular Scale Surveyor (CLASS) is an experiment to measure the signature of a gravita-tional-wave background from inflation in the polarization of the cosmic microwave background (CMB). CLASS is a multi-frequency array of four telescopes operating from a high-altitude site in the Atacama Desert in Chile. CLASS will survey 70\% of the sky in four frequency bands centered at 38, 93, 148, and 217 GHz, which are chosen to straddle the Galactic-foreground minimum while avoiding strong atmospheric emission lines. This broad frequency coverage ensures that CLASS can distinguish Galactic emission from the CMB. The sky fraction of the CLASS survey will allow the full shape of the primordial B-mode power spectrum to be characterized, including the signal from reionization at low $\ell$. Its unique combination of large sky coverage, control of systematic errors, and high sensitivity will allow CLASS to measure or place upper limits on the tensor-to-scalar ratio at a level of $r=0.01$ and make a cosmic-variance-limited measurement of the optical depth to the surface of last scattering, $\tau$.

The Cosmology Large Angular Scale Surveyor (CLASS) experiment aims to map the polarization of the Cosmic Microwave Background (CMB) at angular scales larger than a few degrees. Operating from Cerro Toco in the Atacama Desert of Chile, it will observe over 65% of the sky at 38, 93, 148, and 217 GHz. In this paper we discuss the design, construction, and characterization of the CLASS 38 GHz detector focal plane, the first ever Q-band bolometric polarimeter array.

We report on the status and development of polarization-sensitive detectors for millimeter-wave applications. The detectors are fabricated on single-crystal silicon, which functions as a low-loss dielectric substrate for the microwave circuitry as well as the supporting membrane for the Transition-Edge Sensor (TES) bolometers. The orthomode transducer (OMT) is realized as a symmetric structure and on-chip filters are employed to define the detection bandwidth. A hybridized integrated enclosure reduces the high-frequency THz mode set that can couple to the TES bolometers. An implementation of the detector architecture at Q-band achieves 90% efficiency in each polarization. The design is scalable in both frequency coverage, 30-300 GHz, and in number of detectors with uniform characteristics. Hence, the detectors are desirable for ground-based or space-borne instruments that require large arrays of efficient background-limited cryogenic detectors.

We report on the diffusive-ballistic thermal conductance of multi-moded single-crystal silicon beams measured below 1 K. It is shown that the phonon mean-free-path $\ell$ is a strong function of the surface roughness characteristics of the beams. This effect is enhanced in diffuse beams with lengths much larger than $\ell$, even when the surface is fairly smooth, 5-10 nm rms, and the peak thermal wavelength is 0.6 $\mu$m. Resonant phonon scattering has been observed in beams with a pitted surface morphology and characteristic pit depth of 30 nm. Hence, if the surface roughness is not adequately controlled, the thermal conductance can vary significantly for diffuse beams fabricated across a wafer. In contrast, when the beam length is of order $\ell$, the conductance is dominated by ballistic transport and is effectively set by the beam area. We have demonstrated a uniformity of $\pm$8% in fractional deviation for ballistic beams, and this deviation is largely set by the thermal conductance of diffuse beams that support the micro-electro-mechanical device and electrical leads. In addition, we have found no evidence for excess specific heat in single-crystal silicon membranes. This allows for the precise control of the device heat capacity with normal metal films. We discuss the results in the context of the design and fabrication of large-format arrays of far-infrared and millimeter wavelength cryogenic detectors.