We present the design, simulation, and planned fabrication process of a flat high resistivity silicon gradient index (GRIN) lens for millimeter and submillimeter wavelengths with very low absorption losses. The gradient index is created by subwavelength holes whose size increases with the radius of the lens. The effective refractive index created by the subwavelength holes is constant over a very wide bandwidth, allowing the fabrication of achromatic lenses up to submillimeter wavelengths. The designed GRIN lens was successfully simulated and shows an expected efficiency better than that of a classic silicon plano-concave spherical lens with approximately the same thickness and focal length. Deep reactive ion etching (DRIE) and wafer-bonding of several patterned wafers will be used to realize our first GRIN lens prototype.

Silicon optics with wide bandwidth anti-reflection (AR) coatings, made of multi-layer textured silicon surfaces, are developed for millimeter and submillimeter wavelengths. Single and double layer AR coatings were designed for an optimal transmission centered on 250 GHz, and fabricated using the DRIE (Deep Reaction Ion Etching) technique. Tests of high resistivity silicon wafers with single-layer coatings between 75 GHz and 330 GHz are presented and compared with the simulations.

Although high-resistivity, low-loss silicon is an excellent material for THz transmission optics, its high refractive index necessitates antireflection treatment. We fabricated a wide-bandwidth, two-layer antireflection treatment by cutting subwavelength structures into the silicon surface using multi-depth deep reactive ion etching (DRIE). A wafer with this treatment on both sides has <-20 dB (<1%) reflectance over 190-310 GHz. We also demonstrated that bonding wafers introduces no reflection features above the -20 dB level, reproducing previous work. Together these developments immediately enable construction of wide-bandwidth silicon vacuum windows and represent two important steps toward gradient-index silicon optics with integral broadband antireflection treatment.

We have developed antenna-coupled transition-edge sensor (TES) bolometers for a wide range of cosmic microwave background (CMB) polarimetry experiments, including BICEP2, Keck Array, and the balloon borne SPIDER. These detectors have reached maturity and this paper reports on their design principles, overall performance, and key challenges associated with design and production. Our detector arrays repeatedly produce spectral bands with 20%-30% bandwidth at 95, 150, or 220~GHz. The integrated antenna arrays synthesize symmetric co-aligned beams with controlled side-lobe levels. Cross-polarized response on boresight is typically ~0.5%, consistent with cross-talk in our multiplexed readout system. End-to-end optical efficiencies in our cameras are routinely 35% or higher, with per detector sensitivities of NET~300 uKrts. Thanks to the scalability of this design, we have deployed 2560 detectors as 1280 matched pairs in Keck Array with a combined instantaneous sensitivity of ~9 uKrts, as measured directly from CMB maps in the 2013 season. Similar arrays have recently flown in the SPIDER instrument, and development of this technology is ongoing.

SuperSpec is a novel on-chip spectrometer we are developing for multi-object, moderate resolution (R = 100 - 500), large bandwidth (~1.65:1) submillimeter and millimeter survey spectroscopy of high-redshift galaxies. The spectrometer employs a filter bank architecture, and consists of a series of half-wave resonators formed by lithographically-patterned superconducting transmission lines. The signal power admitted by each resonator is detected by a lumped element titanium nitride (TiN) kinetic inductance detector (KID) operating at 100-200 MHz. We have tested a new prototype device that is more sensitive than previous devices, and easier to fabricate. We present a characterization of a representative R=282 channel at f = 236 GHz, including measurements of the spectrometer detection efficiency, the detector responsivity over a large range of optical loading, and the full system optical efficiency. We outline future improvements to the current system that we expect will enable construction of a photon-noise-limited R=100 filter bank, appropriate for a line intensity mapping experiment targeting the [CII] 158 micron transition during the Epoch of Reionization

SuperSpec is an ultra-compact spectrometer-on-a-chip for millimeter and submillimeter wavelength astronomy. Its very small size, wide spectral bandwidth, and highly multiplexed readout will enable construction of powerful multibeam spectrometers for high-redshift observations. The spectrometer consists of a horn-coupled microstrip feedline, a bank of narrow-band superconducting resonator filters that provide spectral selectivity, and Kinetic Inductance Detectors (KIDs) that detect the power admitted by each filter resonator. The design is realized using thin-film lithographic structures on a silicon wafer. The mm-wave microstrip feedline and spectral filters of the first prototype are designed to operate in the band from 195-310 GHz and are fabricated from niobium with at Tc of 9.2K. The KIDs are designed to operate at hundreds of MHz and are fabricated from titanium nitride with a Tc of 2K. Radiation incident on the horn travels along the mm-wave microstrip, passes through the frequency-selective filter, and is finally absorbed by the corresponding KID where it causes a measurable shift in the resonant frequency. In this proceedings, we present the design of the KIDs employed in SuperSpec and the results of initial laboratory testing of a prototype device. We will also briefly describe the ongoing development of a demonstration instrument that will consist of two 500-channel, R=700 spectrometers, one operating in the 1-mm atmospheric window and the other covering the 650 and 850 micron bands.

SuperSpec is a pathfinder for future lithographic spectrometer cameras, which promise to energize extra-galactic astrophysics at (sub)millimeter wavelengths: delivering 200--500 km/s spectral velocity resolution over an octave bandwidth for every pixel in a telescope's field of view. We present circuit simulations that prove the concept, which enables complete millimeter-band spectrometer devices in just a few square-millimeter footprint. We evaluate both single-stage and two-stage channelizing filter designs, which separate channels into an array of broad-band detectors, such as bolometers or kinetic inductance detector (KID) devices. We discuss to what degree losses (by radiation or by absorption in the dielectric) and fabrication tolerances affect the resolution or performance of such devices, and what steps we can take to mitigate the degradation. Such design studies help us formulate critical requirements on the materials and fabrication process, and help understand what practical limits currently exist to the capabilities these devices can deliver today or over the next few years.

We report observations of the reactive molecular ions OH$^+$, H$_2$O$^+$, and H$_3$O$^+$ towards Orion KL with Herschel/HIFI. All three $N=1-0$ fine-structure transitions of OH$^+$ at 909, 971, and 1033GHz and both fine-structure components of the doublet {\it ortho}-H$_2$O$^+$ $1_{11}-0_{00}$ transition at 1115 and 1139GHz were detected; an upper limit was obtained for H$_3$O$^+$. OH$^+$ and H$_2$O$^+$ are observed purely in absorption, showing a narrow component at the source velocity of 9 kms$^{-1}$, and a broad blueshifted absorption similar to that reported recently for HF and {\it para}-H$_{2}^{18}$O, and attributed to the low velocity outflow of Orion KL. We estimate column densities of OH$^+$ and H$_2$O$^+$ for the 9 km s$^{-1}$ component of $9 \pm 3 \times 10^{12}$cm$^{-2}$ and $7 \pm 2 \times 10^{12}$cm$^{-2}$, and those in the outflow of $1.9 \pm 0.7 \times 10^{13}$cm$^{-2}$ and $1.0 \pm 0.3 \times 10^{13}$cm$^{-2}$. Upper limits of $2.4\times 10^{12}$cm$^{-2}$ and $8.7\times 10^{12}$cm$^{-2}$ were derived for the column densities of {\it ortho} and {\it para}-H$_3$O$^+$ from transitions near 985 and 1657GHz. The column densities of the three ions are up to an order of magnitude lower than those obtained from recent observations of W31C and W49N. The comparatively low column densities may be explained by a higher gas density despite the assumption of a very high ionization rate.

To investigate the accretion and feedback processes in massive star formation, we analyze the shapes of emission lines from hot molecular cores, whose asymmetries trace infall and expansion motions. The high-mass star forming region SgrB2(M) was observed with Herschel/HIFI (HEXOS key project) in various lines of HCN and its isotopologues, complemented by APEX data. The observations are compared to spherically symmetric, centrally heated models with density power-law gradient and different velocity fields (infall or infall+expansion), using the radiative transfer code RATRAN. The HCN line profiles are asymmetric, with the emission peak shifting from blue to red with increasing J and decreasing line opacity (HCN to H$^{13}$CN). This is most evident in the HCN 12--11 line at 1062 GHz. These line shapes are reproduced by a model whose velocity field changes from infall in the outer part to expansion in the inner part. The qualitative reproduction of the HCN lines suggests that infall dominates in the colder, outer regions, but expansion dominates in the warmer, inner regions. We are thus witnessing the onset of feedback in massive star formation, starting to reverse the infall and finally disrupting the whole molecular cloud. To obtain our result, the THz lines uniquely covered by HIFI were critically important.

We have observed CH absorption lines ($J=3/2, N=1 \leftarrow J=1/2, N=1$) against the continuum source Sgr~B2(M) using the \textit{Herschel}/HIFI instrument. With the high spectral resolution and wide velocity coverage provided by HIFI, 31 CH absorption features with different radial velocities and line widths are detected and identified. The narrower line width and lower column density clouds show `spiral arm' cloud characteristics, while the absorption component with the broadest line width and highest column density corresponds to the gas from the Sgr~B2 envelope. The observations show that each `spiral arm' harbors multiple velocity components, indicating that the clouds are not uniform and that they have internal structure. This line-of-sight through almost the entire Galaxy offers unique possibilities to study the basic chemistry of simple molecules in diffuse clouds, as a variety of different cloud classes are sampled simultaneously. We find that the linear relationship between CH and H$_2$ column densities found at lower $A_V$ by UV observations does not continue into the range of higher visual extinction. There, the curve flattens, which probably means that CH is depleted in the denser cores of these clouds.

We describe the design and performance of polarization selective antenna-coupled TES arrays that will be used in several upcoming Cosmic Microwave Background (CMB) experiments: SPIDER, BICEP-2/SPUD. The fully lithographic polarimeter arrays utilize planar phased-antennas for collimation (F/4 beam) and microstrip filters for band definition (25% bandwidth). These devices demonstrate high optical efficiency, excellent beam shapes, and well-defined spectral bands. The dual-polarization antennas provide well-matched beams and low cross polarization response, both important for high-fidelity polarization measurements. These devices have so far been developed for the 100 GHz and 150 GHz bands, two premier millimeter-wave atmospheric windows for CMB observations. In the near future, the flexible microstrip-coupled architecture can provide photon noise-limited detection for the entire frequency range of the CMBPOL mission. This paper is a summary of the progress we have made since the 2006 SPIE meeting in Orlando, FL.