M33 is a gas rich spiral galaxy of the Local Group. We investigate the relationship between the two major gas cooling lines and the total infrared (TIR) dust continuum. We mapped the emission of gas and dust in M33 using the far-infrared lines of [CII] and [OI](63um) and the TIR. The line maps were observed with Herschel/PACS. These maps have 50pc resolution and form a ~370pc wide stripe along its major axis covering the sites of bright HII regions, but also more quiescent arm and inter-arm regions from the southern arm at 2kpc galacto-centric distance to the south out to 5.7kpc distance to the north. Full-galaxy maps of the continuum emission at 24um from Spitzer/MIPS, and at 70um, 100um, and 160um from PACS were combined to obtain a map of the TIR. TIR and [CII] intensities are correlated over more than two orders of magnitude. The range of TIR translates to a range of far ultraviolet (FUV) emission of G0,obs~2 to 200 in units of the average Galactic radiation field. The binned [CII]/TIR ratio drops with rising TIR, with large, but decreasing scatter. Fits of modified black bodies (MBBs) to the continuum emission were used to estimate dust mass surface densities and total gas column densities. A correction for possible foreground absorption by cold gas was applied to the [OI] data before comparing it with models of photon dominated regions (PDRs). Most of the ratios of [CII]/[OI] and ([CII]+[OI])/TIR are consistent with two model solutions. The median ratios are consistent with one solution at n~2x10^2 cm-3, G0~60, and and a second low-FUV solution at n~10^4 cm-3, G0~1.5. The bulk of the gas along the lines-of-sight is represented by a low-density, high-FUV phase with low beam filling factors ~1. A fraction of the gas may, however, be represented by the second solution.

Strong winds and ultraviolet (UV) radiation from O-type stars disrupt and ionize their molecular core birthplaces, sweeping up material into parsec-size shells. Owing to dissociation by starlight, the thinnest shells are expected to host low molecular abundances and therefore little star formation. Here, we expand previous maps taken with the IRAM 30m telescope and present square-degree 12CO and 13CO (J=2-1) maps of the wind-driven "Veil bubble'' that surrounds the Trapezium cluster and its natal Orion molecular core (OMC). Although widespread and extended CO emission is largely absent from the Veil, we show that several CO "globules'' exist and are embedded in the [CII]158um-bright shell that confines the bubble. This includes the first detection of quiescent CO at negative LSR velocities in Orion. Given the harsh UV irradiation conditions in this translucent material, the detection of CO globules is surprising. These globules are small (R=7,100 AU), not massive (M=0.3M_Sun), and are moderately dense: n_ H=4x10^4 cm^-3 (median values). They are confined by the external pressure of the shell, P_ext/k~10^7 cm^-3 K, and are likely magnetically supported. They are either transient objects formed by instabilities or have detached from pre-existing molecular structures, sculpted by the passing shock associated with the expanding shell and by UV radiation from the Trapezium. Some represent the first stages in the formation of small pillars, others of isolated small globules. Although their masses do not suggest they will form stars, one globule matches the position of a known YSO. The lack of extended CO in the "Veil shell'' demonstrates that feedback from massive stars expels, agitates, and reprocesses most of the disrupted molecular cloud gas, thereby limiting the star-formation rate in the region. The presence of globules is a result of this feedback.

Understanding the matter cycle in the interstellar medium of galaxies from the assembly of clouds to star formation and stellar feedback remains an important and exciting field in comtemporary astrophysics. Many open questions regarding cloud and structure formation, the role of turbulence, and the relative importance of the various feedback processes can only be addressed with observations of spectrally resolved lines. We here stress the importance of two specific sets of lines: the finestructure lines of atomic carbon as a tracer of the dark molecular gas and mid-J CO lines as tracers of the warm, active molecular gas in regions of turbulence dissipation and feedback. The observations must cover a wide range of environments (i.e., physical conditions), which will be achieved by large scale surveys of Galactic molecular clouds, the Galactic Center, the Magellanic clouds, and nearby galaxies. To date, such surveys are completely missing and thus constitute an important science opportunity for the next decade and beyond. For the successful interpretation of the observations, it will be essential to combine them with results from (chemical) modelling and simulations of the interstellar medium.

We present the performance of the upGREAT heterodyne array receivers on the SOFIA telescope after several years of operations. This instrument is a multi-pixel high resolution (R > 10^7) spectrometer for the Stratospheric Observatory for Far-Infrared Astronomy (SOFIA). The receivers use 7-pixel subarrays configured in a hexagonal layout around a central pixel. The low frequency array receiver (LFA) has 2x7 pixels (dual polarization), and presently covers the 1.83-2.06 THz frequency range, which allows to observe the [CII] and [OI] lines at 158 um and 145 um wavelengths. The high frequency array (HFA) covers the [OI] line at 63 um and is equipped with one polarization at the moment (7 pixels, which can be upgraded in the near future with a second polarization array). The 4.7 THz array has successfully flown using two separate quantum-cascade laser local oscillators from two different groups. NASA completed the development, integration and testing of a dual-channel closed-cycle cryocooler system, with two independently operable He compressors, aboard SOFIA in early 2017 and since then, both arrays can be operated in parallel using a frequency separating dichroic mirror. This configuration is now the prime GREAT configuration and has been added to SOFIA's instrument suite since observing cycle 6.

We present a [CII] 158um map of the entire M51 (including M51b) grand--design spiral galaxy observed with the FIFI-LS instrument on SOFIA. We compare the [CII] emission with the total far--infrared (TIR) intensity and star formation rate(SFR) surface density maps (derived using H_alpha and 24um emission) to study the relationship between [CII] and the star formation activity in a variety of environments within M51 on scales of 16" corresponding to ~660 pc. We find that [CII] and the SFR surface density are well correlated in the central, spiral arm, and inter-arm regions. The correlation is in good agreement with that found for a larger sample of nearby galaxies at kpc scales. We find that the SFR, and [CII] and TIR luminosities in M51 are dominated by the extended emission in M51's disk. The companion galaxy M51b, however, shows a deficit of [CII] emission compared with the TIR emission and SFR surface density, with [CII] emission detected only in the S-W part of this galaxy. The [CII] deficit is associated with an enhanced dust temperature in this galaxy. We interpret the faint [CII] emission in M51b to be a result of suppressed star formation in this galaxy, while the bright mid- and far-infrared emission, which drive the TIR and SFR values, are powered by other mechanisms. A similar but less pronounced effect is seen at the location of the black hole in M51's center. The observed [CII] deficit in M51b suggests that this galaxy is a valuable laboratory to study the origin of the apparent [CII] deficit observed in ultra-luminous galaxies.

We present a new multi-pixel high resolution (R >10^7) spectrometer for the Stratospheric Observatory for Far-Infrared Astronomy (SOFIA). The receiver uses 2 x 7-pixel subarrays in orthogonal polarization, each in an hexagonal array around a central pixel. We present the first results for this new instrument after commissioning campaigns in May and December 2015 and after science observations performed in May 2016 . The receiver is designed to ultimately cover the full 1.8-2.5 THz frequency range but in its first implementation, the observing range was limited to observations of the [CII] line at 1.9 THz in 2015 and extended to 1.83-2.07 THz in 2016. The instrument sensitivities are state-of-the-art and the first scientific observations performed shortly after the commissioning confirm that the time efficiency for large scale imaging is improved by more than an order of magnitude as compared to single pixel receivers. An example of large scale mapping around the Horsehead Nebula is presented here illustrating this improvement. The array has been added to SOFIA's instrument suite already for ongoing observing cycle 4.

We aim to better understand the heating of the gas by observing the prominent gas cooling line [CII] at 158um in the low-metallicity environment of the Local Group spiral galaxy M33 at scales of 280pc. In particular, we aim at describing the variation of the photoelectric heating efficiency with galactic environment. In this unbiased study, we used ISO/LWS [CII] observations along the major axis of M33, in combination with Herschel PACS and SPIRE continuum maps, IRAM 30m CO 2-1 and VLA HI data to study the variation of velocity integrated intensities. The ratio of [CII] emission over the far-infrared continuum is used as a proxy for the heating efficiency, and models of photon-dominated regions are used to study the local physical densities, FUV radiation fields, and average column densities of the molecular clouds. The heating efficiency stays constant at 0.8% in the inner 4.5kpc radius of the galaxy where it starts to increase to reach values of ~3% in the outskirts at about 6kpc radial distance. The rise of efficiency is explained in the framework of PDR models by lowered volume densities and FUV fields, for optical extinctions of only a few magnitudes at constant metallicity. In view of the significant fraction of HI emission stemming from PDRs, and for typical pressures found in the Galactic cold neutral medium (CNM) traced by HI emission, the CNM contributes ~15% to the observed [CII] emission in the inner 2kpc radius of M33. The CNM contribution remains largely undetermined in the south, while positions between 2 and 7.3kpc radial distance in the north of M33 show a contribution of ~40%+-20%.

We aim to better understand the emission of molecular tracers of the diffuse and dense gas in giant molecular clouds and the influence that metallicity, optical extinction, density, far-UV field, and star formation rate have on these tracers. Using the IRAM 30m telescope, we detected HCN, HCO+, 12CO, and 13CO in six GMCs along the major axis of M33 at a resolution of ~ 114pc and out to a radial distance of 3.4kpc. Optical, far-infrared, and submillimeter data from Herschel and other observatories complement these observations. To interpret the observed molecular line emission, we created two grids of models of photon-dominated regions, one for solar and one for M33-type subsolar metallicity. The observed HCO+/HCN line ratios range between 1.1 and 2.5. Similarly high ratios have been observed in the Large Magellanic Cloud. The HCN/CO ratio varies between 0.4% and 2.9% in the disk of M33. The 12CO/13CO line ratio varies between 9 and 15 similar to variations found in the diffuse gas and the centers of GMCs of the Milky Way. Stacking of all spectra allowed HNC and C2H to be detected. The resulting HCO+/HNC and HCN/HNC ratios of ~ 8 and 6, respectively, lie at the high end of ratios observed in a large set of (ultra-)luminous infrared galaxies. HCN abundances are lower in the subsolar metallicity PDR models, while HCO+ abundances are enhanced. For HCN this effect is more pronounced at low optical extinctions. The observed HCO+/HCN and HCN/CO line ratios are naturally explained by subsolar PDR models of low optical extinctions between 4 and 10 mag and of moderate densities of n = 3x10^3 - 3x10^4 cm^-3, while the FUV field strength only has a small effect on the modeled line ratios. The line ratios are almost equally well reproduced by the solar-metallicity models, indicating that variations in metallicity only play a minor role in influencing these line ratios.

Within the framework of the Herschel M 33 extended survey HerM33es we study the Spectral Energy Distribution (SED) of a set of HII regions in M 33 as a function of the morphology. We present a catalogue of 119 HII regions morphologically classified: 9 filled, 47 mixed, 36 shell, and 27 clear shell HII regions. For each object we extract the photometry at twelve available wavelength bands (from FUV-1516A to IR-250mi) and obtain the SED. We also obtain emission line profiles across the regions to study the location of the stellar, ionised gas, and dust components. We find trends for the SEDs related to the morphology, showing that the star and gas-dust configuration affects the ratios of the emission in different bands. The mixed and filled regions show higher emission at 24mi than the shells and clear shells, which could be due to the proximity of the dust to the stellar clusters in the case of mixed and filled regions. The FIR peak for shells and clear shells seems to be located towards longer wavelengths, indicating that the dust is colder for this type of objects.The logarithmic 100/70mi ratio for filled and mixed regions remains constant over one order of magnitude in Halpha and FUV surface brightness, while the shells and clear shells exhibit a wider range of values of almost two orders of magnitude. We derive dust masses and temperatures fitting the individual SEDs with dust models proposed in the literature. The derived dust mass range is between 10^2-10^4 Msun and the cold dust temperature spans T(cold)~12-27 K. The spherical geometrical model proposed for the Halpha clear shells is confirmed by the emission profile obtained from the observations and is used to infer the electron density within the envelope: the typical electron density is 0.7+-0.3 cm^-3, while filled regions can reach values two to five times higher.

We study the far-infrared emission from the nearby spiral galaxy M33 in order to investigate the dust physical properties such as the temperature and the luminosity density across the galaxy. Taking advantage of the unique wavelength coverage (100, 160, 250, 350 and 500 micron) of the Herschel Space Observatory and complementing our dataset with Spitzer-IRAC 5.8 and 8 micron and Spitzer-MIPS 24 and 70 micron data, we construct temperature and luminosity density maps by fitting two modified blackbodies of a fixed emissivity index of 1.5. We find that the 'cool' dust grains are heated at temperatures between 11 and 28 K with the lowest temperatures found in the outskirts of the galaxy and the highest ones in the center and in the bright HII regions. The infrared/submillimeter total luminosity (5 - 1000 micron) is estimated to be 1.9x10^9 Lsun. 59% of the total luminosity of the galaxy is produced by the 'cool' dust grains (~15 K) while the rest 41% is produced by 'warm' dust grains (~55 K). The ratio of the cool-to-warm dust luminosity is close to unity (within the computed uncertainties), throughout the galaxy, with the luminosity of the cool dust being slightly enhanced in the center of the galaxy. Decomposing the emission of the dust into two components (one emitted by the diffuse disk of the galaxy and one emitted by the spiral arms) we find that the fraction of the emission in the disk in the mid-infrared (24 micron) is 21%, while it gradually rises up to 57% in the submillimeter (500 micron). We find that the bulk of the luminosity comes from the spiral arm network that produces 70% of the total luminosity of the galaxy with the rest coming from the diffuse dust disk. The 'cool' dust inside the disk is heated at a narrow range of temperatures between 18 and 15 K (going from the center to the outer parts of the galaxy).

Power spectra of de-projected images of late-type galaxies in gas and/or dust emission are very useful diagnostics of the dynamics and stability of their interstellar medium. Previous studies have shown that the power spectra can be approximated as two power-laws, a shallow one at large scales (larger than 500 pc) and a steeper one at small scales, with the break between the two corresponding to the line-of-sight thickness of the galaxy disk. We present a thorough analysis of the power spectra of the dust and gas emission at several wavelengths in the nearby galaxy M33. In particular, we use the recently obtained images at five wavelengths by PACS and SPIRE onboard Herschel. The large dynamical range (2-3 dex in scale) of most images allow us to determine clearly the change in slopes from -1.5 to -4, with some variations with wavelength. The break scale is increasing with wavelength, from 100 pc at 24 and 100micron to 350 pc at 500micron, suggesting that the cool dust lies in a thicker disk than the warm dust, may be due to star formation more confined to the plane. The slope at small scale tends to be steeper at longer wavelength, meaning that the warmer dust is more concentrated in clumps. Numerical simulations of an isolated late-type galaxy, rich in gas and with no bulge, like M33, are carried out, in order to better interpret these observed results. Varying the star formation and feedback parameters, it is possible to obtain a range of power-spectra, with two power-law slopes and breaks, which nicely bracket the data. The small-scale power-law is indeed reflecting the 3D behaviour of the gas layer, steepening strongly while the feedback smoothes the structures, by increasing the gas turbulence. M33 appears to correspond to a fiducial model with an SFR of $\sim$ 0.7 Mo/yr, with 10% supernovae energy coupled to the gas kinematics.

Context: The emission line of [CII] at 158 micron is one of the strongest cooling lines of the interstellar medium (ISM) in galaxies. Aims: Disentangling the relative contributions of the different ISM phases to [CII] emission, is a major topic of the HerM33es program, a Herschel key project to study the ISM in the nearby spiral galaxy M33. Methods: Using PACS, we have mapped the emission of [CII] 158 micron, [OI] 63 micron, and other FIR lines in a 2'x2' region of the northern spiral arm of M33, centered on the HII region BCLMP302. At the peak of H-alpha emission, we have observed in addition a velocity resolved [CII] spectrum using HIFI. We use scatterplots to compare these data with PACS 160 micron continuum maps, and with maps of CO and HI data, at a common resolution of 12 arcsec or 50 pc. Maps of H-alpha and 24 micron emission observed with Spitzer are used to estimate the SFR. We have created maps of the [CII] and [OI] 63 micron emission and detected [NII] 122 micron and NIII 57 micron at individual positions. Results: The [CII] line observed with HIFI is significantly broader than that of CO, and slightly blue-shifted. In addition, there is little spatial correlation between [CII] observed with PACS and CO over the mapped region. There is even less spatial correlation between [CII] and the atomic gas traced by HI. Detailed comparison of the observed intensities towards the HII region with models of photo ionization and photon dominated regions, confirms that a significant fraction, 20--30%, of the observed [CII] emission stems from the ionized gas and not from the molecular cloud. The gas heating efficiency, using the ratio between [CII] and the TIR as a proxy, varies between 0.07 and 1.5%, with the largest variations found outside the HII region.

Within the key project "Herschel M33 extended survey" (HerM33es), we are studying the physical and chemical processes driving star formation and galactic evolution in the nearby galaxy M33, combining the study of local conditions affecting individual star formation with properties only becoming apparent on global scales. Here, we present recent results obtained by the HerM33es team. Combining Spitzer and Herschel data ranging from 3.6um to 500um, along with HI, Halpha, and GALEX UV data, we have studied the dust at high spatial resolutions of 150pc, providing estimators of the total infrared (TIR) brightness and of the star formation rate. While the temperature of the warm dust at high brightness is driven by young massive stars, evolved stellar populations appear to drive the temperature of the cold dust. Plane-parallel models of photon dominated regions (PDRs) fail to reproduce fully the [CII], [OI], and CO maps obtained in a first spectroscopic study of one 2'x2' subregion of M33, located on the inner, northern spiral arm and encompassing the HII region BCLMP302.

We study the relation between molecular gas and star formation in a volume-limited sample of 222 galaxies from the COLD GASS survey, with measurements of the CO(1-0) line from the IRAM 30m telescope. The galaxies are at redshifts 0.025<z<0.05 and have stellar masses in the range 10.0<log(M*/Msun)<11.5. The IRAM measurements are complemented by deep Arecibo HI observations and homogeneous SDSS and GALEX photometry. A reference sample that includes both UV and far-IR data is used to calibrate our estimates of star formation rates from the seven optical/UV bands. The mean molecular gas depletion timescale, tdep(H2), for all the galaxies in our sample is 1 Gyr, however tdep(H2) increases by a factor of 6 from a value of ~0.5 Gyr for galaxies with stellar masses of 10^10 Msun to ~3 Gyr for galaxies with masses of a few times 10^11 Msun. In contrast, the atomic gas depletion timescale remains contant at a value of around 3 Gyr. This implies that in high mass galaxies, molecular and atomic gas depletion timescales are comparable, but in low mass galaxies, molecular gas is being consumed much more quickly than atomic gas. The strongest dependences of tdep(H2) are on the stellar mass of the galaxy (parameterized as log tdep(H2)= (0.36+/-0.07)(log M* - 10.70)+(9.03+/-0.99)), and on the specific star formation rate. A single tdep(H2) versus sSFR relation is able to fit both "normal" star-forming galaxies in our COLD GASS sample, as well as more extreme starburst galaxies (LIRGs and ULIRGs), which have tdep(H2) < 10^8 yr. Normal galaxies at z=1-2 are displaced with respect to the local galaxy population in the tdep(H2) versus sSFR plane and have molecular gas depletion times that are a factor of 3-5 times longer at a given value of sSFR due to their significantly larger gas fractions.

We are conducting COLD GASS, a legacy survey for molecular gas in nearby galaxies. Using the IRAM 30m telescope, we measure the CO(1-0) line in a sample of ~350 nearby (D=100-200 Mpc), massive galaxies (log(M*/Msun)>10.0). The sample is selected purely according to stellar mass, and therefore provides an unbiased view of molecular gas in these systems. By combining the IRAM data with SDSS photometry and spectroscopy, GALEX imaging and high-quality Arecibo HI data, we investigate the partition of condensed baryons between stars, atomic gas and molecular gas in 0.1-10L* galaxies. In this paper, we present CO luminosities and molecular hydrogen masses for the first 222 galaxies. The overall CO detection rate is 54%, but our survey also uncovers the existence of sharp thresholds in galaxy structural parameters such as stellar mass surface density and concentration index, below which all galaxies have a measurable cold gas component but above which the detection rate of the CO line drops suddenly. The mean molecular gas fraction MH2/M* of the CO detections is 0.066+/-0.039, and this fraction does not depend on stellar mass, but is a strong function of NUV-r colour. Through stacking, we set a firm upper limit of MH2/M*=0.0016+/-0.0005 for red galaxies with NUV-r>5.0. The average molecular-to-atomic hydrogen ratio in present-day galaxies is 0.3, with significant scatter from one galaxy to the next. The existence of strong detection thresholds in both the HI and CO lines suggests that "quenching" processes have occurred in these systems. Intriguingly, atomic gas strongly dominates in the minority of galaxies with significant cold gas that lie above these thresholds. This suggests that some re-accretion of gas may still be possible following the quenching event.

We present an analysis of the first space-based far-IR-submm observations of M 33, which measure the emission from the cool dust and resolve the giant molecular cloud complexes. With roughly half-solar abundances, M33 is a first step towards young low-metallicity galaxies where the submm may be able to provide an alternative to CO mapping to measure their H$_2$ content. In this Letter, we measure the dust emission cross-section $\sigma$ using SPIRE and recent CO and \HI\ observations; a variation in $\sigma$ is present from a near-solar neighborhood cross-section to about half-solar with the maximum being south of the nucleus. Calculating the total H column density from the measured dust temperature and cross-section, and then subtracting the \HI\ column, yields a morphology similar to that observed in CO. The H$_2$/\HI\ mass ratio decreases from about unity to well below 10% and is about 15% averaged over the optical disk. The single most important observation to reduce the potentially large systematic errors is to complete the CO mapping of M 33.

Within the framework of the HERM33ES key project, we are studying the star forming interstellar medium in the nearby, metal-poor spiral galaxy M33, exploiting the high resolution and sensitivity of Herschel. We use PACS and SPIRE maps at 100, 160, 250, 350, and 500 micron wavelength, to study the variation of the spectral energy distributions (SEDs) with galacto-centric distance. Detailed SED modeling is performed using azimuthally averaged fluxes in elliptical rings of 2 kpc width, out to 8 kpc galacto-centric distance. Simple isothermal and two-component grey body models, with fixed dust emissivity index, are fitted to the SEDs between 24 and 500 micron using also MIPS/Spitzer data, to derive first estimates of the dust physical conditions. The far-infrared and submillimeter maps reveal the branched, knotted spiral structure of M33. An underlying diffuse disk is seen in all SPIRE maps (250-500 micron). Two component fits to the SEDs agree better than isothermal models with the observed, total and radially averaged flux densities. The two component model, with beta fixed at 1.5, best fits the global and the radial SEDs. The cold dust component clearly dominates; the relative mass of the warm component is less than 0.3% for all the fits. The temperature of the warm component is not well constrained and is found to be about 60K plus/minus 10K. The temperature of the cold component drops significantly from about 24K in the inner 2 kpc radius to 13K beyond 6 kpc radial distance, for the best fitting model. The gas-to-dust ratio for beta=1.5, averaged over the galaxy, is higher than the solar value by a factor of 1.5 and is roughly in agreement with the subsolar metallicity of M33.

Within the framework of the HERM33ES Key Project, using the high resolution and sensitivity of the Herschel photometric data, we study the compact emission in the Local Group spiral galaxy M33 to investigate the nature of the compact SPIRE emission sources. We extracted a catalogue of sources at 250um in order to investigate the nature of this compact emission. Taking advantage of the unprecedented Herschel resolution at these wavelengths, we also focus on a more precise study of some striking Halpha shells in the northern part of the galaxy. We present a catalogue of 159 compact emission sources in M33 identified by SExtractor in the 250um SPIRE band that is the one that provides the best spatial resolution. We also measured fluxes at 24um and Halpha for those 159 extracted sources. The morphological study of the shells also benefits from a multiwavelength approach including Halpha, far-UV from GALEX, and infrared from both Spitzer IRAC 8um and MIPS 24um in order to make comparisons. For the 159 compact sources selected at 250um, we find a very strong Pearson correlation coefficient with the MIPS 24um emission (r24 = 0.94) and a rather strong correlation with the Halpha emission, although with more scatter (rHa = 0.83). The morphological study of the Halpha shells shows a displacement between far-ultraviolet, Halpha, and the SPIRE bands. The cool dust emission from SPIRE clearly delineates the Halpha shell structures. The very strong link between the 250um compact emission and the 24um and Halpha emissions, by recovering the star formation rate from standard recipes for HII regions, allows us to provide star formation rate calibrations based on the 250um compact emission alone. The different locations of the Halpha and far-ultraviolet emissions with respect to the SPIRE cool dust emission leads to a dynamical age of a few Myr for the Halpha shells and the associated cool dust.

Over the past few years several studies have provided estimates of the SFR (star-formation rate) or the total infrared luminosity from just one infrared band. However these relations are generally derived for entire galaxies, which are known to contain a large scale diffuse emission that is not necessarily related to the latest star-formation episode. We provide new relations to estimate the SFR from resolved star-forming regions at 100 mum and 160 mum. We select individual star-forming regions in the nearby (840 kpc) galaxy M33. We estimate the SFR combining the emission in Halpha and at 24 mum to calibrate the emission at 100 mum and 160 mum as SFR estimators, as mapped with PACS/Herschel. The data are obtained in the framework of the HERM33ES open time key project. There is less emission in the HII regions at 160 mum than at 100 mum. Over a dynamic range of almost 2 dex in Sigma(SFR) we find that the 100 mum emission is a nearly linear estimator of the SFR, whereas that at 160 mum is slightly superlinear. The behaviour of individual star-forming regions is surprisingly similar to that of entire galaxies. At high Sigma(SFR), star formation drives the dust temperature, whereas uncertainties and variations in radiation-transfer and dust-heated processes dominate at low Sigma(SFR). Detailed modelling of both galaxies and individual star forming regions will be needed to interpret similarities and differences between the two and assess the fraction of diffuse emission in galaxies.